TY  - JOUR
A1  - Prume, Klaus
A1  - Muralt, P.
A1  - Calame, F.
A1  - Schmitz-Kempen, T.
T1  - Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices  / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;
JF  - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1
Y1  - 2007
SN  - 0885-3010
SP  - 81
EP  - 14
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Tyholdt, F.
A1  - Calame, F.
A1  - Raeder, H.
T1  - Chemically derived seeding layer for {100}-textured PZT thin films   / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P.
JF  - Journal of Electroceramics. 19 (2007), H. 4
Y1  - 2007
SN  - 1385-3449
SP  - 311
EP  - 314
ER  -