TY - JOUR A1 - Schöning, Michael Josef A1 - Simonis, Anette A1 - Ruge, Christian A1 - Ecken, Holger A1 - Müller-Veggian, Mattea A1 - Lüth, Hans T1 - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer JF - Sensors. 2 (2002), H. 1 N2 - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode. Y1 - 2002 SN - 1424-8220 U6 - http://dx.doi.org/10.3390/s20100011 SP - 11 EP - 22 ER - TY - JOUR A1 - Müller-Veggian, Mattea A1 - Cesari, V. A1 - De Nardo, L. A1 - Colautti, P. T1 - First microdosimetric measurements with a 10b-loaded TEPC JF - Annual report / Istituto Nazionale di Fisica Nucleare, LNL, Laboratori Nazionali di Legnaro. 2001 (2002) Y1 - 2002 SN - 88-7337-002-0 N1 - LNL-INFN(REP)-182/2002 SP - 110 EP - 111 ER - TY - CHAP A1 - Peters, H. A1 - Ziemons, Karl A1 - Dammers, J. A1 - Müller-Veggian, Mattea ED - Nenonen, Jukka T1 - Continuous head motion detection during MEG measurement using head location coils T2 - Proceedings of the 12th International Conference on Biomagnetism : August 13 - 17, 2000, Helsinki University of Technology, Espoo, Finland Y1 - 2001 SN - 951-22-5401-8 N1 - Biomag <12, 2000, Espoo> ; Teknillinen Korkeakoulu ; International Conference on Biomagnetism <12, 2000, Espoo> PB - Helsinki Univ. of Technology, Laboratory of Biomedical Engineering CY - Espoo ER - TY - JOUR A1 - Müller-Veggian, Mattea A1 - Cesari, V. A1 - De Nardo, L. A1 - Colautti, P. T1 - First microdosimetric measurements down to 25nm JF - Annual report / Istituto Nazionale di Fisica Nucleare, LNL, Laboratori Nazionali di Legnaro. 2000 (2001) Y1 - 2001 SN - 88-7337-000-4 N1 - LNL-INFN(REP)-178/2001 SP - 82 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Thust, M. A1 - Schöning, Michael Josef A1 - Müller-Veggian, Mattea A1 - Kordos, P. A1 - Lüth, H. T1 - Cross-sensitivity of a capacitive penicillin sensor combined with a diffusion barrier JF - Sensors and Actuators B. 68 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 260 EP - 265 ER - TY - JOUR A1 - Müller-Veggian, Mattea A1 - Cesari, V. A1 - Conte, V. A1 - De Nardo, L. T1 - TEPCs working at nanometre level JF - Annual report / Istituto Nazionale di Fisica Nucleare, LNL, Laboratori Nazionali di Legnaro. 1999 (2000) Y1 - 2000 N1 - LNL-INFN(REP)-160/2000 SP - 117 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, Jürgen A1 - Zander, Willy A1 - Müller-Veggian, Mattea T1 - Pulsed laser deposition as a novel preparation technique for chemical microsensors JF - Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999) Y1 - 1999 SP - 124 EP - 134 ER - TY - JOUR A1 - Thust, M. A1 - Poghossian, Arshak A1 - Schöning, Michael Josef A1 - Naser, S. A1 - Müller-Veggian, Mattea A1 - Kordos, P. A1 - Lüth, H. T1 - Crosssensitivity of a capacitive penicillin sensor combined with a diffusion barrier JF - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1. Y1 - 1999 SN - 90-76699-02-X N1 - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague) SP - 573 EP - 576 CY - The Hague, The Netherlands ER - TY - JOUR A1 - Thust, M. A1 - Poghossian, Arshak A1 - Schöning, Michael Josef A1 - Naser, S. A1 - Müller-Veggian, Mattea A1 - Kordos, P. A1 - Lüth, H. T1 - Cross-sensitivity of a capacitive penicillin sensor combined with a diffusion barrier JF - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. - Vol 1. Y1 - 1999 SN - 90-76699-02-X N1 - Eurosensors <13, 1999, 's-Gravenhage> ; Eurosensors <13, 1999, The Hague> ; European Conference on Solid-State Transducers <13, 1999, The Hague> SP - 573 EP - 576 CY - The Hague, The Netherlands ER - TY - JOUR A1 - Müller-Veggian, Mattea A1 - Colautti, P. A1 - Conte, V. A1 - De Nardo, L. T1 - Advanced TEPC (Tissue-equivalent proportional counters) for radiation monitoring JF - Annual report / Istituto Nazionale di Fisica Nucleare, LNL, Laboratori Nazionali di Legnaro. 1998 (1999) Y1 - 1999 SP - 106 ER -