TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Lehr, H.
A1  - Abel, S.
A1  - Ehrfeld, W.
T1  - Assembly of Electromagnetic Milliactuators with LIGA Components. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Thürigen, C.
JF  - Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994)
Y1  - 1995
N1  - 2nd Japan-France Congress on mechatronics (1994 Nov : Takamatsu, Japan)
SP  - 31
EP  - 31
PB  - Fuji Technology Press
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Hagemann, B.
A1  - Lehr, H.
A1  - Michel, F.
T1  - LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F.; Thürigen, C.
JF  - LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.
Y1  - 1995
N1  - University Enterprise Training Partnership for Micro-Electro-Mechanical Systems
SP  - 100
EP  - 110
PB  - FSRM
CY  - Neuchatel
ER  -