TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Ronkel, F.
A1  - Crott, M.
A1  - Thust, M. (u.a.)
T1  - Miniaturization of potentiometric sensors using porous silicon microtechnology
JF  - Electrochimica Acta. 42 (1997), H. 22
Y1  - 1997
SN  - 0013-4686
SP  - 3185
EP  - 3193
ER  - 
TY  - PAT
A1  - Ahlborn, Kristina
A1  - Gerlach, Frank
A1  - Iken, Heiko
A1  - Schöning, Michael Josef
A1  - Vonau, Winfried
T1  - Miniaturisierte, potentiometrische Indikatorelektrode und Verfahren zu deren Herstellung : Offenlegungsschrift
Y1  - 2012
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Lüth, H.
A1  - Wang, J.
A1  - Schöning, Michael Josef
T1  - Miniaturisierte Referenzelektroden in Siliziumtechnologie für elektrochemische Sensoranwendungen
JF  - Sensoren und Messsysteme 2004 : Tagung Ludwigsburg, 15. und 16. März 2004 / VDI-VDE-Gesellschaft Mess- und Automatisierungstechnik
Y1  - 2004
SN  - 3-18-091829-2
N1  - Auch erschienen als: VDI-Berichte ; 1829
SP  - 847
EP  - 850
PB  - VDI
CY  - Düsseldorf
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
T1  - Miniaturisierbare Halbleitersensoren für die Penicillinbestimmung in der Biotechnologie
JF  - MessTec. 3 (1996)
Y1  - 1996
SN  - 0947-4234
SP  - 82
EP  - 85
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Dawgul, M.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Miniaturised reference electrodes for field-effect sensors compatible to silicon chip technology
JF  - Electrochimica Acta. 51 (2005), H. 5
Y1  - 2005
SN  - 0013-4686
U6  - http://dx.doi.org/10.1016/j.electacta.2005.04.063
SP  - 930
EP  - 937
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Näther, Niko
A1  - Auger, V.
A1  - Poghossian, Arshak
A1  - Koudelka-Hep, M.
T1  - Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies
JF  - Sensors and Actuators B. 108 (2005), H. 1-2
Y1  - 2005
SN  - 0925-4005
N1  - Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004
SP  - 986
EP  - 992
ER  - 
TY  - CHAP
A1  - Platen, Johannes
A1  - Poghossian, Arshak
A1  - Schöning, Michael Josef
T1  - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique
N2  - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.
KW  - Biosensor
KW  - Nanostructuring
KW  - layer expansion
KW  - pattern-size reduction
KW  - self-aligned patterning
Y1  - 2006
U6  - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477
ER  - 
TY  - JOUR
A1  - Poghossian, Arshak
A1  - Ingebrandt, S.
A1  - Yeung, C.-K.
A1  - Offenhäusser, A.
A1  - Schöning, Michael Josef
T1  - Microsensors based on ion-sensitive field-effect transistors for biomedical applications
JF  - Biomedizinische Technik. 49 (2004), H. 2
Y1  - 2004
SN  - 0932-4666
SP  - 1036
EP  - 1037
ER  - 
TY  - JOUR
A1  - Moritz, W.
A1  - Yoshinobu, T.
A1  - Finger, F.
A1  - Krause, S.
A1  - Xu, M.
A1  - Schöning, Michael Josef
T1  - Microscopy of impedance and surface ion concentrations
JF  - Biomedizinische Technik. 49 (2004), H. 2
Y1  - 2004
SN  - 0932-4666
SP  - 1000
EP  - 1001
ER  - 
TY  - JOUR
A1  - Leinhos, Marcel
A1  - Schusser, Sebastian
A1  - Bäcker, Matthias
A1  - Poghossian, Arshak
A1  - Schöning, Michael Josef
T1  - Micromachined multi-parameter sensor chip for the control of polymer-degradation medium
JF  - Physica Status Solidi (A) : special issue on engineering and functional interfaces
N2  - It is well known that the degradation environment can strongly influence the biodegradability and kinetics of biodegradation processes of polymers. Therefore, besides the monitoring of the degradation process, it is also necessary to control the medium in which the degradation takes place. In this work, a micromachined multi-parameter sensor chip for the control of the polymer-degradation medium has been developed. The chip combines a capacitive field-effect pH sensor, a four-electrode electrolyte-conductivity sensor and a thin-film Pt-temperature sensor. The results of characterization of individual sensors are presented. In addition, the multi-parameter sensor chip together with an impedimetric polymer-degradation sensor was simultaneously characterized in degradation solutions with different pH and electrolyte conductivity. The obtained results demonstrate the feasibility of the multi-parameter sensor chip for the control of the polymer-degradation medium.
Y1  - 2014
U6  - http://dx.doi.org/10.1002/pssa.201330364
SN  - 1521-396X (E-Journal); 1862-6319 (E-Journal); 0031-8965 (Print); 1862-6300 (Print)
VL  - 211
IS  - 6
SP  - 1346
EP  - 1351
PB  - Wiley-VCH
CY  - Weinheim
ER  -