TY - JOUR A1 - Abouzar, Maryam H. A1 - Ingebrandt, S. A1 - Poghossian, Arshak A1 - Zhang, Y. A1 - Vu, X. T. A1 - Moritz, W. A1 - Schöning, Michael Josef T1 - Nanoplate field-effect capacitive (bio-)chemical sensor array based on SOI structure JF - Procedia Chemistry. 1 (2009), H. 1 Y1 - 2009 SN - 1876-6196 N1 - Proceedings of the Eurosensors XXIII conference ; Eurosensors 23 SP - 670 EP - 673 ER -