TY - CHAP A1 - Förster, Arnold A1 - Stock, Jürgen A1 - Montanari, Simone A1 - Lepsa, Mihail Ion A1 - Lüth, Hans T1 - Fabrication and characterisation of GaAs Gunn Diode Chips for applications at 77 GHz in automotive industry N2 - GaAs-based Gunn diodes with graded AlGaAs hot electron injector heterostructures have been developed under the special needs in automotive applications. The fabrication of the Gunn diode chips was based on total substrate removal and processing of integrated Au heat sinks. Especially, the thermal and RF behavior of the diodes have been analyzed by DC, impedance and S-parameter measurements. The electrical investigations have revealed the functionality of the hot electron injector. An optimized layer structure could fulfill the requirements in adaptive cruise control (ACC) systems at 77 GHz with typical output power between 50 and 90 mW. KW - Biosensor KW - Gunn diode KW - microwave generation KW - GaAs hot electron injector Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1462 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Simonis, Anette A1 - Ruge, Christian A1 - Ecken, Holger A1 - Müller-Veggian, Mattea A1 - Lüth, Hans T1 - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer JF - Sensors. 2 (2002), H. 1 N2 - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode. Y1 - 2002 SN - 1424-8220 U6 - http://dx.doi.org/10.3390/s20100011 SP - 11 EP - 22 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Berndsen, Lars A1 - Lüth, Hans A1 - Schöning, Michael Josef T1 - Novel concepts for flow-rate and flow-direction determination by means of pH-sensitive ISFETs JF - Proceedings of SPIE. 4560 (2001) Y1 - 2001 SP - 19 EP - 27 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schroth, Peter A1 - Lüth, Hans A1 - Hummel, Hans E. A1 - Schütz, Stefan T1 - Insect chemoreceptors coupled to silicon transistors as innovative biosensors JF - Proceedings of SPIE. 4205 (2001) Y1 - 2001 SP - 152 EP - 162 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Yoshinobu, Tatsuo A1 - Lüth, Hans T1 - Semiconductor-based field-effect structures for chemical sensing Y1 - 2001 SP - 188 EP - 198 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Yoshinobu, Tatsuo A1 - Simonis, A. A1 - Ecken, H. A1 - Lüth, Hans A1 - Schöning, Michael Josef T1 - Penicillin detection by means of field-effect based sensors: EnFET, capacitive EIS sensor or LAPS? JF - Sensors and Actuators B. 78 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 237 EP - 242 ER -