TY - JOUR A1 - Prume, Klaus A1 - Roelofs, Andreas A1 - Schmitz, Thorsten A1 - Reichenberg, Bernd T1 - Compensation of the Parasitic Capacitance of a Scanning Force Microscope Cantilever Used for Measurements on Ferroelectric Capacitors of Submicron Size by Means of Finite Element Simulations / Prume, Klaus ; Roelofs, Andreas ; Schmitz, Thorsten ; Reichenb JF - Japanese Journal of Applied Physics. 41 (2002), H. 11B Y1 - 2002 SN - 0021-4922 SP - 7198 EP - 7201 ER - TY - JOUR A1 - Prume, Klaus A1 - Gerber, Peter A1 - Kügeler, Carsten A1 - Roelofs, Andreas T1 - Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size / Prume, K. ; Gerber, P. ; Kügeler, C. ; Roelofs, A. ; Böttger, U. ; Waser, R. ; Schmitz-Kempen, Y1 - 2004 SN - 0-7803-8410-5 N1 - 14th IEEE International Symposium on Applications of Ferroelectrics, 2004. ISAF-04. 2004 SP - 7 EP - 10 ER -