TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, J
A1  - Kloock, Joachim P.
A1  - Zander, W.
A1  - Mourzina, Y. G.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Innovative thin film techniques for microfabricating electrochemical sensors
JF  - Lecture Notes of the ICB Seminars
Y1  - 2002
SP  - 55
EP  - 66
PB  - MCB
CY  - Warsaw
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
T1  - Silicon-based biochemical sensors
JF  - CNI - The Center of Nanoelectronic Systems for Information Technology
Y1  - 2003
SP  - 165
EP  - 170
PB  - Foschungszentrum Jülich
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Lüth, H.
T1  - Microfabricated semiconductor structures – Advances in (bio-)chemical sensing
JF  - Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed.
Y1  - 2002
SN  - 3-540-43699-5
SP  - 79
EP  - 92
PB  - Springer
CY  - Berlin [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, Joachim P.
A1  - Kloock, Joachim P.
A1  - Zander, W.
A1  - Mourzina, Y. G.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Innovative thin film techniques for microfabricating electrochemical sensors
JF  - Biocybernetics and Biomedical Engineering. 21 (2001), H. 4
Y1  - 2001
SN  - 0208-5216
SP  - 107
EP  - 119
ER  - 
TY  - JOUR
A1  - Schroth, P.
A1  - Weißbecker, B.
A1  - Schütz, S.
A1  - Ecken, H.
A1  - Yoshinobu, T.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Bioelectronic signal processing - intact chemoreceptors coupled to field-effect devices
JF  - Lecture Notes of the ICB Seminars
Y1  - 2002
SP  - 28
EP  - 42
PB  - MCB
CY  - Warsaw
ER  - 
TY  - JOUR
A1  - Schroth, P.
A1  - Weißbecker, B.
A1  - Schütz, S.
A1  - Ecken, H.
A1  - Yoshinobu, T.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Bioelectronic signal processing - intact chemoreceptors coupled to field-effect devices
JF  - Biocybernetics and Biomedical Engineering. 21 (2001), H. 3
Y1  - 2001
SN  - 0208-5216
SP  - 27
EP  - 42
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
T1  - Novel approaches to design siliconbased field-effect sensors
JF  - Electrochemical Microsystem Technologies, New Trends in Electrochemistry Vol. 2
Y1  - 2002
SP  - 384
EP  - 408
PB  - Taylor & Francis
CY  - London New York
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Lüth, H.
T1  - Novel concepts for silicon-based biosensors
JF  - Physica Status Solidi (A) (2001)
Y1  - 2001
SN  - 0031-8965
SP  - 65
EP  - 77
ER  - 
TY  - JOUR
A1  - Kurowski, A.
A1  - Schultze, J.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Micro- and nanopatterning of sensor chips by means of macroporous silicon.
JF  - Sensors and Actuators B. 83 (2002), H. 1-3
Y1  - 2002
SN  - 0925-4005
N1  - Selected Papers from TRANSDUCERS '01 EUROSENSORS XV
SP  - 123
EP  - 128
ER  - 
TY  - JOUR
A1  - Ermelenko, Y.
A1  - Yoshinobu, T.
A1  - Mourzina, Y.
A1  - Furuichi, K.
A1  - Levichev, S.
A1  - Vlasov, Y.
A1  - Schöning, Michael Josef
A1  - Iwasaki, H.
T1  - Lithium sensor based on the laser scanning semiconductor transducer
JF  - Analytica Chimica Acta. 459 (2002), H. 1
Y1  - 2002
SN  - 0378-4304
SP  - 1
EP  - 9
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schroth, Peter
A1  - Lüth, Hans
A1  - Hummel, Hans E.
A1  - Schütz, Stefan
T1  - Insect chemoreceptors coupled to silicon transistors as innovative biosensors
JF  - Proceedings of SPIE. 4205 (2001)
Y1  - 2001
SP  - 152
EP  - 162
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, Jürgen
A1  - Zander, Willy
A1  - Müller-Veggian, Mattea
T1  - Pulsed laser deposition as a novel preparation technique for chemical microsensors
JF  - Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999)
Y1  - 1999
SP  - 124
EP  - 134
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Glück, O.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Emons, H.
T1  - Thin film electrodes for trace metal analysis by dc resistance changes
JF  - Proceedings of SPIE. 3857 (1999)
Y1  - 1999
SP  - 135
EP  - 143
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
T1  - A novel silicon-based sensor array with capacitive EIS structures
JF  - Sensors and Actuators B. 47 (1998), H. 1-3
Y1  - 1998
SN  - 0925-4005
SP  - 225
EP  - 230
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Tsarouchas, D.
A1  - Schaub, A.
A1  - Beckers, L. (u.a.)
T1  - A highly long-term stable silicon-based pH sensor using pulsed laser deposition technique
JF  - Sensors and Actuators B. 35 (1996), H. 1-3
Y1  - 1996
SN  - 0925-4005
SP  - 228
EP  - 233
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Sauke, M.
A1  - Steffen, A.
A1  - Marso, M. (u.a.)
T1  - Ion-sensitive field-effect transistors with ultrathin Langmuir-Blodgett membranes
JF  - Sensors and Actuators B. 27 (1995), H. 1-3
Y1  - 1995
SN  - 0925-4005
SP  - 325
EP  - 328
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Bruns, M.
A1  - Hoffmann, W.
A1  - Hoffmann, B. (u.a.)
T1  - Iodide ion-sensitive field-effect structures
JF  - Sensors and Actuators B. 15 (1993), H. 1-3
Y1  - 1993
SN  - 0925-4005
SP  - 192
EP  - 194
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, Anette
A1  - Ruge, Christian
A1  - Ecken, Holger
A1  - Müller-Veggian, Mattea
A1  - Lüth, Hans
T1  - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer
JF  - Sensors. 2 (2002), H. 1
N2  - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.
Y1  - 2002
SN  - 1424-8220
U6  - https://doi.org/10.3390/s20100011
SP  - 11
EP  - 22
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Krings, T.
A1  - Lüth, H.
A1  - Wang, J.
A1  - Schöning, Michael Josef
T1  - A „hybrid“ thin-film pH sensor with integrated thick-film reference
JF  - Sensors. 1 (2001), H. 6
Y1  - 2001
SN  - 1424-8220
SP  - 183
EP  - 192
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
T1  - Microelectronics contacts (bio-)chemistry – Semiconductor-based sensors
JF  - Biologi Italiani. 8 (2001)
Y1  - 2001
SN  - 0392-2510
SP  - 5
EP  - 10
ER  -