TY - JOUR A1 - Kurowski, A. A1 - Schultze, J. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Micro- and nanopatterning of sensor chips by means of macroporous silicon. JF - Sensors and Actuators B. 83 (2002), H. 1-3 Y1 - 2002 SN - 0925-4005 N1 - Selected Papers from TRANSDUCERS '01 EUROSENSORS XV SP - 123 EP - 128 ER - TY - JOUR A1 - Ermelenko, Y. A1 - Yoshinobu, T. A1 - Mourzina, Y. A1 - Furuichi, K. A1 - Levichev, S. A1 - Vlasov, Y. A1 - Schöning, Michael Josef A1 - Iwasaki, H. T1 - Lithium sensor based on the laser scanning semiconductor transducer JF - Analytica Chimica Acta. 459 (2002), H. 1 Y1 - 2002 SN - 0378-4304 SP - 1 EP - 9 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Lüth, H. T1 - Field-effect based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical paramters JF - Proceedings of SPIE. 4576 (2002) Y1 - 2002 SP - 149 EP - 159 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Berndsen, Lars A1 - Lüth, Hans A1 - Schöning, Michael Josef T1 - Novel concepts for flow-rate and flow-direction determination by means of pH-sensitive ISFETs JF - Proceedings of SPIE. 4560 (2001) Y1 - 2001 SP - 19 EP - 27 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schroth, Peter A1 - Lüth, Hans A1 - Hummel, Hans E. A1 - Schütz, Stefan T1 - Insect chemoreceptors coupled to silicon transistors as innovative biosensors JF - Proceedings of SPIE. 4205 (2001) Y1 - 2001 SP - 152 EP - 162 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Yoshinobu, Tatsuo A1 - Lüth, Hans T1 - Semiconductor-based field-effect structures for chemical sensing Y1 - 2001 SP - 188 EP - 198 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Kurowski, A. A1 - Thust, M. A1 - Kordos, P. A1 - Schultze, J. W. A1 - Lüth, H. T1 - Capacitive microsensors for biochemical sensing on porous silicon technology JF - Sensors and Actuators B. 64 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 59 EP - 64 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schütz, S. A1 - Schroth, P. A1 - Weißbecker, B. A1 - Steffen, A. A1 - Kordos, P. A1 - Hummel, Hans E. T1 - A BioFET on the basis of intact insect antennae JF - Sensors and Actuators B. 47 (1998), H. 1-3 Y1 - 1998 SN - 0925-4005 SP - 235 EP - 238 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Thust, M. A1 - Müller-Veggian, Mattea A1 - Kordos, P. T1 - A novel silicon-based sensor array with capacitive EIS structures JF - Sensors and Actuators B. 47 (1998), H. 1-3 Y1 - 1998 SN - 0925-4005 SP - 225 EP - 230 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Tsarouchas, D. A1 - Schaub, A. A1 - Beckers, L. (u.a.) T1 - A highly long-term stable silicon-based pH sensor using pulsed laser deposition technique JF - Sensors and Actuators B. 35 (1996), H. 1-3 Y1 - 1996 SN - 0925-4005 SP - 228 EP - 233 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Sauke, M. A1 - Steffen, A. A1 - Marso, M. (u.a.) T1 - Ion-sensitive field-effect transistors with ultrathin Langmuir-Blodgett membranes JF - Sensors and Actuators B. 27 (1995), H. 1-3 Y1 - 1995 SN - 0925-4005 SP - 325 EP - 328 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Bruns, M. A1 - Hoffmann, W. A1 - Hoffmann, B. (u.a.) T1 - Iodide ion-sensitive field-effect structures JF - Sensors and Actuators B. 15 (1993), H. 1-3 Y1 - 1993 SN - 0925-4005 SP - 192 EP - 194 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Simonis, Anette A1 - Ruge, Christian A1 - Ecken, Holger A1 - Müller-Veggian, Mattea A1 - Lüth, Hans T1 - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer JF - Sensors. 2 (2002), H. 1 N2 - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode. Y1 - 2002 SN - 1424-8220 U6 - http://dx.doi.org/10.3390/s20100011 SP - 11 EP - 22 ER - TY - JOUR A1 - Simonis, A. A1 - Krings, T. A1 - Lüth, H. A1 - Wang, J. A1 - Schöning, Michael Josef T1 - A „hybrid“ thin-film pH sensor with integrated thick-film reference JF - Sensors. 1 (2001), H. 6 Y1 - 2001 SN - 1424-8220 SP - 183 EP - 192 ER - TY - JOUR A1 - Schöning, Michael Josef T1 - Microelectronics contacts (bio-)chemistry – Semiconductor-based sensors JF - Biologi Italiani. 8 (2001) Y1 - 2001 SN - 0392-2510 SP - 5 EP - 10 ER - TY - JOUR A1 - Mourzina, Y. G. A1 - Ermelenko, Y. E. A1 - Yoshinobu, T. A1 - Vlasov, Y. A1 - Iwasaki, H. A1 - Schöning, Michael Josef T1 - Anionselective light-addressable potentiometric sensors (LAPS) for the determination of nitrate and suphate ions JF - Sensors and Actuators B. 91 (2003), H. 1-3 Y1 - 2003 SN - 0925-4005 SP - 32 EP - 38 ER - TY - JOUR A1 - Simonis, A. A1 - Ruge, C. A1 - Müller-Veggian, Mattea A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - A long-term stable macroporoustype EIS structure for electrochemical sensor applications JF - Sensors and Actuators B. 91 (2003), H. 1-3 Y1 - 2003 SN - 0925-4005 SP - 21 EP - 25 ER - TY - JOUR A1 - Keusgen, M. A1 - Jünger, M. A1 - Krest, I. A1 - Schöning, Michael Josef T1 - Development of a biosensor specific for cysteine sulfoxides JF - Biosensors & Bioelectronics. 18 (2003), H. 5-6 Y1 - 2003 SN - 0956-5663 SP - 805 EP - 812 ER - TY - JOUR A1 - Ermelenko, Y. A1 - Yoshinobu, T. A1 - Mourzina, Y. A1 - Schöning, Michael Josef A1 - Furuichi, K. A1 - Levichev, S. A1 - Vlasov, Y. A1 - Iwasaki, H. T1 - The double K+/Ca2+ sensor based on laser scanned silicon transducer (LSST) for multicomponent analysis JF - Talanta. 59 (2003), H. 4 Y1 - 2003 SN - 0039-9140 SP - 785 EP - 795 ER - TY - JOUR A1 - Wang, J. A1 - Krause, R. A1 - Block, K. A1 - Musameh, M. A1 - Mulchandani, A. A1 - Schöning, Michael Josef T1 - Flow injection amperometric detection of OP nerve agents based on organophosphorus-hydrolase biosensor detector JF - Biosensors & Bioelectronics. 18 (2003), H. 2-3 Y1 - 2003 SN - 0956-5663 SP - 255 EP - 260 ER -