TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Merten, Sabine
A1  - Brill, Manfred
A1  - Cassel, Detlev (u.a.)
T1  - Virtuelle Sensor-Fertigung: Hightech mit LabVIEW
JF  - Virtuelle Instrumente in der Praxis : Messtechnik, Automatisierung ; Begleitband zum Kongress VIP 2003 / Rahman Jamal ; Hans Jaschinski (Hrsg.)
Y1  - 2003
SN  - 3-7785-2908-0
N1  - Konferenz-Einzelbericht: Praxiswissen Elektronik-Industrie: Messtechnik -Automatisierung
SP  - 465
EP  - 470
PB  - Hüthig
CY  - Heidelberg
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Picard, Antoni
A1  - Brill, Manfred
A1  - Cassel, Detlev
A1  - Jentsch, Andreas
A1  - Merten, Sabine
A1  - Rollwa, Markus
T1  - The Virtual Clean Room - a new tool in teaching MST process technologies
N2  - The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.
KW  - Virtuelle Maschine
KW  - VM
KW  - Mikrosystemtechnik
KW  - MST
KW  - virtual clean room
Y1  - 2003
ER  -