TY - CHAP A1 - Poghossian, Arshak A1 - Schumacher, Kerstin A1 - Kloock, Joachim P. A1 - Rosenkranz, Christian A1 - Schultze, Joachim W. A1 - Müller-Veggian, Mattea A1 - Schöning, Michael Josef T1 - Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell N2 - A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors. KW - Biosensor KW - Biosensorik KW - ISFET KW - Wafer KW - ISFET KW - wafer-level testing KW - capillary micro-droplet cell Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1259 ER - TY - CHAP A1 - Platen, Johannes A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique N2 - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures. KW - Biosensor KW - Nanostructuring KW - layer expansion KW - pattern-size reduction KW - self-aligned patterning Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477 ER - TY - CHAP A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Silicon-based chemical and biological field-effect sensors T2 - Encyclopedia of Sensors. Vol. 9 S - Sk Y1 - 2006 SN - 1-58883-065-9 SP - 463 EP - 534 PB - ASP, American Scientific Publ. CY - Stevenson Ranch, Calif. ER - TY - CHAP A1 - Poghossian, Arshak A1 - Ingebrandt, S. A1 - Platen, J. A1 - Schöning, Michael Josef T1 - Field-effect sensors with charged macromolecules – from micro towards nano aspects T2 - Biochemical Sensing Utilisation of Micro-and Nanotechnologies, Warschau, Nov. 2005 : Lecture Notes of the ICB Seminar / ed.: M. Mascini, W. Torbicz Y1 - 2006 SP - 74 EP - 81 PB - Polish Academy Sciences Press CY - Warsaw ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Abouzar, Maryam H. A1 - Ingebrandt, Sven A1 - Platen, Johannes A1 - Offenhäusser, Andreas A1 - Poghossian, Arshak ED - Comini, Elisabetta T1 - Towards label-free detection of charged macromolecules using field-effect-based structures : Scaling down from capacitive EIS sensor over ISFET to nano-scale devices JF - Nanostructured materials and hybrid composites for gas sensors and biomedical applications : symposium held April 18-20, 2006, San Francisco , California, U.S.A. Y1 - 2006 SN - 9781558998711 IS - paper 0915-R05-04 SP - 89 EP - 94 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Platen, J. A1 - Schöning, Michael Josef T1 - Towards self-aligned nanostructures by means of layerexpansion technique JF - Electrochimica Acta. 51 (2005), H. 5 Y1 - 2005 SN - 0013-4686 SP - 838 EP - 843 ER - TY - JOUR A1 - Näther, Niko A1 - Rolka, David A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. A1 - Schöning, Michael Josef T1 - Two microcell flow-injection analysis (FIA) platforms for capacitive silicon-based field-effect sensors JF - Electrochimica Acta. 51 (2005), H. 5 Y1 - 2005 SN - 0013-4686 U6 - http://dx.doi.org/10.1016/j.electacta.2005.04.066 SP - 924 EP - 929 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies JF - Sensors and Actuators B. 108 (2005), H. 1-2 Y1 - 2005 SN - 0925-4005 N1 - Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004 SP - 986 EP - 992 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Cherstvy, A. A1 - Ingebrandt, S. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Possibilities and limitations of label-free detection of DNA hybridization with field-effect-based devices JF - Sensors and Actuators B. 111-112 (2005) Y1 - 2005 SN - 0925-4005 N1 - Eurosensors XVIII 2004 — The 18th European Conference on Solid-State Transducers SP - 470 EP - 480 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Brinkmann, D. A1 - Rolka, David A1 - Demuth, C. A1 - Poghossian, Arshak T1 - CIP (cleaning-in-place) suitable “non-glass” pH sensor based on a Ta2O5-gate EIS structure JF - Sensors and Actuators B: Chemical. 111-112 (2005) Y1 - 2005 SN - 0925-4005 N1 - Eurosensors XVIII 2004 - The 18th European Conference on Solid-State Transducers SP - 423 EP - 429 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Detecting Both Physical and (Bio-)Chemical Parameters by Means of ISFET Devices JF - Electroanalysis. 16 (2004), H. 22 Y1 - 2004 SN - 1040-0397 SP - 1863 EP - 1872 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Mai, D.-T. A1 - Mourzina, Y. A1 - Schöning, Michael Josef T1 - Impedance effect of an ion-sensitive membrane: characterisation of an EMIS sensor by impedance spectroscopy, capacitance-voltage and constant-capacitance method JF - Sensors and Actuators B. 103 (2004), H. 1-2 Y1 - 2004 SN - 0925-4005 SP - 423 EP - 428 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Ingebrandt, S. A1 - Yeung, C.-K. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Microsensors based on ion-sensitive field-effect transistors for biomedical applications JF - Biomedizinische Technik. 49 (2004), H. 2 Y1 - 2004 SN - 0932-4666 SP - 1036 EP - 1037 ER - TY - JOUR A1 - Kassab, T. A1 - Han, Y. A1 - Poghossian, Arshak A1 - Ingebrandt, S. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Detection of layerby-layer adsorbed polyelectrolytes by means of field-effect based capacitive EIS structures JF - Biomedizinische Technik. 49 (2004), H. 2 Y1 - 2004 SN - 0932-4666 SP - 1034 EP - 1035 ER - TY - JOUR A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. A1 - Schöning, Michael Josef T1 - A miniaturized flow-through cell in SU-8 technique for EIS sensors JF - Biomedizinische Technik. 49 (2004), H. 2 Y1 - 2004 SN - 0932-4666 SP - 994 EP - 995 ER - TY - JOUR A1 - Rolka, David A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Integration of a capacitive EIS sensor into a FIA system for pH and penicillin determination JF - Sensors. 4 (2004) Y1 - 2004 SN - 1424-8220 SP - 84 EP - 94 ER - TY - JOUR A1 - Knobbe, D.-T. A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Mourzina, Y. T1 - Charakterisierung von kapazitiven EMISSensoren mittels Impedanzspektroskopie, Kapazitäts-Spannungs- und Konstant-Kapazitäts-Messung JF - Sensoren und Messsysteme 2004 : Tagung Ludwigsburg, 15. und 16. März 2004 / VDI-VDE-Gesellschaft Mess- und Automatisierungstechnik Y1 - 2004 SN - 3-18-091829-2 N1 - Auch erschienen als: VDI-Berichte ; 1829 SP - 851 EP - 854 PB - VDI CY - Düsseldorf ER - TY - JOUR A1 - Poghossian, Arshak A1 - Cherstvy, A. A1 - Schöning, Michael Josef T1 - Possibilities and limitations of label-free detection of DNA hybridization with field-effect based devices JF - Digest of technical papers : September 12 - 15, 2004, Rome, Italy, Pontificia Universitas Sancto Thoma Aquinate in Urbe / [conference chairperson: C. Di Natale]. Y1 - 2004 SN - 88-7621-282-5 N1 - Eurosensors ; (18, 2004, Roma) SP - 173 EP - 176 CY - Roma ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Brinkmann, D. A1 - Demuth, C. A1 - Poghossian, Arshak T1 - CIP (cleaning-in-place)-suitable „non-glass“ pH sensor based on a Ta2O5-gate EIS structure JF - Digest of technical papers : September 12 - 15, 2004, Rome, Italy, Pontificia Universitas Sancto Thoma Aquinate in Urbe / [conference chairperson: C. Di Natale]. Y1 - 2004 SN - 88-7621-282-5 N1 - Eurosensors ; (18, 2004, Roma) SP - 857 EP - 860 CY - Roma ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies JF - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors Y1 - 2004 N1 - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba) SP - 554 EP - 555 PB - Japan Association of Chemical Sensors CY - Fukuoka ER -