TY - JOUR A1 - Poghossian, Arshak A1 - Abouzar, Maryam H. A1 - Razavi, A. A1 - Bäcker, Matthias A1 - Bijnens, N. A1 - Williams, O. A. A1 - Haenen, K. A1 - Moritz, W. A1 - Wagner, P. A1 - Schöning, Michael Josef T1 - Nanocrystalline-diamond thin films with high pH and penicillin sensitivity prepared on a capacitive Si–SiO2 structure JF - Electrochimica Acta. 54 (2009), H. 25 Y1 - 2009 SN - 0013-4686 SP - 5981 EP - 5985 ER - TY - JOUR A1 - Christiaens, P. A1 - Abouzar, Maryam H. A1 - Poghossian, Arshak A1 - Wagner, Torsten A1 - Bijnens, N. A1 - Williams, O. A. A1 - Daenen, M. A1 - Haenen, K. A1 - Schöning, Michael Josef A1 - Wagner, P. T1 - Nanocrystalline diamond-based field-effect capacitive pH sensor JF - Transducers '07 Eurosensors XXI : digest of technical papers ; the14th International Conference on Solid-State Sensors, Actuators and Microsystems, June 10-14, 2007, Lyon, France / Gilles Delapierre (Ed.) Y1 - 2007 SN - 1-4244-0841-5 N1 - Eurosensors 21, 2007, Lyon ; International Conference on Solid-State Sensors, Actuators and Microsystems 14, 2007, Lyon SP - 1891 EP - 1894 PB - IEEE CY - Piscataway ER - TY - JOUR A1 - Poghossian, Arshak A1 - Abouzar, Maryam H. A1 - Christiaens, P. A1 - Williams, O. A. A1 - Haenen, K. A1 - Wagner, P. A1 - Schöning, Michael Josef T1 - Nanocrystalline diamond-based field-effect (bio-)chemical sensor JF - 8. Dresdner Sensor-Symposium : Sensoren für Umwelt, Klima und Sicherheit, Biosensoren und Biosysteme, Sensoren und Sensorsysteme für die Prozesstechnik, Trends in der Sensortechnik, Materialentwicklung für die Sensorik; 8. Dresdner Sensor-Symposium, 10. - 12. Dezember 2007, Dresden / Gerald Gerlach ... (Hg.) Y1 - 2007 SN - 978-3-940046-45-1 N1 - Dresdner Sensor-Symposium <8, 2007, Dresden> ; Dresdner Beiträge zur Sensorik ; 29 SP - 191 EP - 194 PB - TUDpress, Verl. der Wissenschaften CY - Dresden ER - TY - JOUR A1 - Karschuck, Tobias A1 - Schmidt, Stefan A1 - Achtsnicht, Stefan A1 - Poghossian, Arshak A1 - Wagner, Patrick A1 - Schöning, Michael Josef T1 - Multiplexing system for automated characterization of a capacitive field-effect sensor array JF - Physica Status Solidi A N2 - In comparison to single-analyte devices, multiplexed systems for a multianalyte detection offer a reduced assay time and sample volume, low cost, and high throughput. Herein, a multiplexing platform for an automated quasi-simultaneous characterization of multiple (up to 16) capacitive field-effect sensors by the capacitive–voltage (C–V) and the constant-capacitance (ConCap) mode is presented. The sensors are mounted in a newly designed multicell arrangement with one common reference electrode and are electrically connected to the impedance analyzer via the base station. A Python script for the automated characterization of the sensors executes the user-defined measurement protocol. The developed multiplexing system is tested for pH measurements and the label-free detection of ligand-stabilized, charged gold nanoparticles. KW - Capacitive field-effect sensor KW - Gold nanoparticles KW - Label-free detection KW - Multicell KW - Multiplexing Y1 - 2023 U6 - http://dx.doi.org/10.1002/pssa.202300265 SN - 1862-6300 (Print) SN - 1862-6319 (Online) N1 - Corresponding author: Michael Josef Schöning VL - 220 IS - 22 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Huck, Christina A1 - Poghossian, Arshak A1 - Kerroumi, Iman A1 - Schusser, Sebastian A1 - Bäcker, Matthias A1 - Zander, Willi A1 - Schubert, Jürgen A1 - Buniatyan, Vahe V. A1 - Martirosyan, Norayr W. A1 - Wagner, Patrick A1 - Schöning, Michael Josef T1 - Multiparameter sensor chip with Barium Strontium Titanate as multipurpose material JF - Electroanalysis N2 - It is well known that biochemical and biotechnological processes are strongly dependent and affected by a variety of physico-chemical parameters such as pH value, temperature, pressure and electrolyte conductivity. Therefore, these quantities have to be monitored or controlled in order to guarantee a stable process operation, optimization and high yield. In this work, a sensor chip for the multiparameter detection of three physico-chemical parameters such as electrolyte conductivity, pH and temperature is realized using barium strontium titanate (BST) as multipurpose material. The chip integrates a capacitively coupled four-electrode electrolyte-conductivity sensor, a capacitive field-effect pH sensor and a thin-film Pt-temperature sensor. Due to the multifunctional properties of BST, it is utilized as final outermost coating layer of the processed sensor chip and serves as passivation and protection layer as well as pH-sensitive transducer material at the same time. The results of testing of the individual sensors of the developed multiparameter sensor chip are presented. In addition, a quasi-simultaneous multiparameter characterization of the sensor chip in buffer solutions with different pH value and electrolyte conductivity is performed. To study the sensor behavior and the suitability of BST as multifunctional material under harsh environmental conditions, the sensor chip was exemplarily tested in a biogas digestate. Y1 - 2014 U6 - http://dx.doi.org/10.1002/elan.201400076 SN - 1521-4109 (E-Journal); 1040-0397 (Print) VL - 26 IS - 5 SP - 980 EP - 987 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Huck, Christina A1 - Poghossian, Arshak A1 - Bäcker, Matthias A1 - Reisert, Steffen A1 - Kramer, Friederike A1 - Begoyan, Vardges K. A1 - Buniatyan, Vahe V. A1 - Schöning, Michael Josef T1 - Multi-parameter sensing using high-k oxide of barium strontium titanate JF - Physica status solidi (a) N2 - High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors. In this work, a Si-based sensor chip containing Pt interdigitated electrodes covered with a thin BST layer (485 nm) has been developed for multi-parameter chemical sensing. The chip has been applied for the contactless measurement of the electrolyte conductivity, the detection of adsorbed charged macromolecules (positively charged polyelectrolytes of polyethylenimine) and the concentration of hydrogen peroxide (H2O2) vapor. The experimental results of functional testing of individual sensors are presented. The mechanism of the BST sensitivity to charged polyelectrolytes and H2O2 vapor has been proposed and discussed. Y1 - 2015 U6 - http://dx.doi.org/10.1002/pssa.201431911 SN - 1862-6319 VL - 212 IS - 6 SP - 1259 PB - Wiley CY - Weinheim ER - TY - CHAP A1 - Näther, Niko A1 - Poghossian, Arshak A1 - Platen, J. A1 - Yoshinobu, T. A1 - Koudelka-Hep, M. A1 - Schöning, Michael Josef T1 - Multi-parameter sensing of both physical and (bio-)chemical quantities using the same transducer principle T2 - Biochemical sensing utilisation of micro- and nanotechnologies : Warsaw, [23rd - 26th] November 2005 / ed. by M. Mascini ... Y1 - 2006 SP - 172 EP - 181 CY - Warsaw ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Schöning, Michael Josef T1 - Multi-parameter detection of (bio-)chemical and physical quantities using an identical transducer principle JF - Sensors and Actuators B. 91 (2003), H. 1-3 Y1 - 2003 SN - 0925-4005 SP - 83 EP - 91 ER - TY - CHAP A1 - Huck, Christina A1 - Poghossian, Arshak A1 - Buniatyan, V. A1 - Schöning, Michael Josef T1 - Multi-parameter detection for supporting monitoring and control of biogas processes in agriculture T2 - Sensoren und Messsysteme 2014 ; Beiträge der 17. GMA/ITG-Fachtagung vom 3. bis 4. Juni 2014 in Nürnberg. (ITG-Fachbericht ; 250) Y1 - 2014 SN - 978-3-8007-3622-5 SP - 1 EP - 5 PB - VDE-Verl. CY - Berlin ER - TY - JOUR A1 - Schusser, Sebastian A1 - Krischer, Maximillian A1 - Bäcker, Matthias A1 - Poghossian, Arshak A1 - Wagner, Patrick A1 - Schöning, Michael Josef T1 - Monitoring of the Enzymatically Catalyzed Degradation of Biodegradable Polymers by Means of Capacitive Field-Effect Sensors JF - Analytical Chemistry N2 - Designing novel or optimizing existing biodegradable polymers for biomedical applications requires numerous tests on the effect of substances on the degradation process. In the present work, polymer-modified electrolyte–insulator–semiconductor (PMEIS) sensors have been applied for monitoring an enzymatically catalyzed degradation of polymers for the first time. The thin films of biodegradable polymer poly(d,l-lactic acid) and enzyme lipase were used as a model system. During degradation, the sensors were read-out by means of impedance spectroscopy. In order to interpret the data obtained from impedance measurements, an electrical equivalent circuit model was developed. In addition, morphological investigations of the polymer surface have been performed by means of in situ atomic force microscopy. The sensor signal change, which reflects the progress of degradation, indicates an accelerated degradation in the presence of the enzyme compared to hydrolysis in neutral pH buffer media. The degradation rate increases with increasing enzyme concentration. The obtained results demonstrate the potential of PMEIS sensors as a very promising tool for in situ and real-time monitoring of degradation of polymers. Y1 - 2015 U6 - http://dx.doi.org/10.1021/acs.analchem.5b00617 SN - 1520-6882 VL - 87 IS - 13 SP - 6607 EP - 6613 PB - ACS Publications CY - Washington, DC ER - TY - JOUR A1 - Molinnus, Denise A1 - Iken, Heiko A1 - Johnen, Anna Lynn A1 - Richstein, Benjamin A1 - Hellmich, Lena A1 - Poghossian, Arshak A1 - Knoch, Joachim A1 - Schöning, Michael Josef T1 - Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta₂O₅ Films Prepared by Atomic Layer Deposition JF - physica status solidi (a) applications and materials science N2 - Miniaturized electrolyte–insulator–semiconductor capacitors (EISCAPs) with ultrathin gate insulators have been studied in terms of their pH-sensitive sensor characteristics: three different EISCAP systems consisting of Al–p-Si–Ta2O5(5 nm), Al–p-Si–Si3N4(1 or 2 nm)–Ta2O5 (5 nm), and Al–p-Si–SiO2(3.6 nm)–Ta2O5(5 nm) layer structures are characterized in buffer solution with different pH values by means of capacitance–voltage and constant capacitance method. The SiO2 and Si3N4 gate insulators are deposited by rapid thermal oxidation and rapid thermal nitridation, respectively, whereas the Ta2O5 film is prepared by atomic layer deposition. All EISCAP systems have a clear pH response, favoring the stacked gate insulators SiO2–Ta2O5 when considering the overall sensor characteristics, while the Si3N4(1 nm)–Ta2O5 stack delivers the largest accumulation capacitance (due to the lower equivalent oxide thickness) and a higher steepness in the slope of the capacitance–voltage curve among the studied stacked gate insulator systems. KW - atomic layer deposition KW - capacitive field-effect sensors KW - pH sensors KW - ultrathin gate insulators Y1 - 2022 U6 - http://dx.doi.org/10.1002/pssa.202100660 SN - 1862-6319 VL - 219 IS - 8 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies JF - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors Y1 - 2004 N1 - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba) SP - 554 EP - 555 PB - Japan Association of Chemical Sensors CY - Fukuoka ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies JF - Sensors and Actuators B. 108 (2005), H. 1-2 Y1 - 2005 SN - 0925-4005 N1 - Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004 SP - 986 EP - 992 ER - TY - CHAP A1 - Platen, Johannes A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique N2 - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures. KW - Biosensor KW - Nanostructuring KW - layer expansion KW - pattern-size reduction KW - self-aligned patterning Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Ingebrandt, S. A1 - Yeung, C.-K. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Microsensors based on ion-sensitive field-effect transistors for biomedical applications JF - Biomedizinische Technik. 49 (2004), H. 2 Y1 - 2004 SN - 0932-4666 SP - 1036 EP - 1037 ER - TY - JOUR A1 - Leinhos, Marcel A1 - Schusser, Sebastian A1 - Bäcker, Matthias A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Micromachined multi-parameter sensor chip for the control of polymer-degradation medium JF - Physica Status Solidi (A) : special issue on engineering and functional interfaces N2 - It is well known that the degradation environment can strongly influence the biodegradability and kinetics of biodegradation processes of polymers. Therefore, besides the monitoring of the degradation process, it is also necessary to control the medium in which the degradation takes place. In this work, a micromachined multi-parameter sensor chip for the control of the polymer-degradation medium has been developed. The chip combines a capacitive field-effect pH sensor, a four-electrode electrolyte-conductivity sensor and a thin-film Pt-temperature sensor. The results of characterization of individual sensors are presented. In addition, the multi-parameter sensor chip together with an impedimetric polymer-degradation sensor was simultaneously characterized in degradation solutions with different pH and electrolyte conductivity. The obtained results demonstrate the feasibility of the multi-parameter sensor chip for the control of the polymer-degradation medium. Y1 - 2014 U6 - http://dx.doi.org/10.1002/pssa.201330364 SN - 1521-396X (E-Journal); 1862-6319 (E-Journal); 0031-8965 (Print); 1862-6300 (Print) VL - 211 IS - 6 SP - 1346 EP - 1351 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Bäcker, Matthias A1 - Raue, Markus A1 - Schusser, Sebastian A1 - Jeitner, C. A1 - Breuer, L. A1 - Wagner, P. A1 - Poghossian, Arshak A1 - Förster, Arnold A1 - Mang, Thomas A1 - Schöning, Michael Josef T1 - Microfluidic chip with integrated microvalves based on temperature- and pH-responsive hydrogel thin films JF - Physica Status Solidi (a) N2 - Two types of microvalves based on temperature-responsive poly(N-isopropylacrylamide) (PNIPAAm) and pH-responsive poly(sodium acrylate) (PSA) hydrogel films have been developed and tested. The PNIPAAm and PSA hydrogel films were prepared by means of in situ photopolymerization directly inside the fluidic channel of a microfluidic chip fabricated by combining Si and SU-8 technologies. The swelling/shrinking properties and height changes of the PNIPAAm and PSA films inside the fluidic channel were studied at temperatures of deionized water from 14 to 36 °C and different pH values (pH 3–12) of Titrisol buffer, respectively. Additionally, in separate experiments, the lower critical solution temperature (LCST) of the PNIPAAm hydrogel was investigated by means of a differential scanning calorimetry (DSC) and a surface plasmon resonance (SPR) method. Mass-flow measurements have shown the feasibility of the prepared hydrogel films to work as an on-chip integrated temperature- or pH-responsive microvalve capable to switch the flow channel on/off. Y1 - 2012 U6 - http://dx.doi.org/10.1002/pssa.201100763 SN - 1862-6319 VL - 209 IS - 5 SP - 839 EP - 845 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Huck, Christina A1 - Schiffels, Johannes A1 - Herrera, Cony N. A1 - Schelden, Maximilian A1 - Selmer, Thorsten A1 - Poghossian, Arshak A1 - Baumann, Marcus A1 - Wagner, Patrick A1 - Schöning, Michael Josef T1 - Metabolic responses of Escherichia coli upon glucose pulses captured by a capacitive field-effect sensor JF - Physica Status Solidi (A) N2 - Living cells are complex biological systems transforming metabolites taken up from the surrounding medium. Monitoring the responses of such cells to certain substrate concentrations is a challenging task and offers possibilities to gain insight into the vitality of a community influenced by the growth environment. Cell-based sensors represent a promising platform for monitoring the metabolic activity and thus, the “welfare” of relevant organisms. In the present study, metabolic responses of the model bacterium Escherichia coli in suspension, layered onto a capacitive field-effect structure, were examined to pulses of glucose in the concentration range between 0.05 and 2 mM. It was found that acidification of the surrounding medium takes place immediately after glucose addition and follows Michaelis–Menten kinetic behavior as a function of the glucose concentration. In future, the presented setup can, therefore, be used to study substrate specificities on the enzymatic level and may as well be used to perform investigations of more complex metabolic responses. Conclusions and perspectives highlighting this system are discussed. Y1 - 2013 U6 - http://dx.doi.org/10.1002/pssa.201200900 SN - 0031-8965 VL - 210 IS - 5 SP - 926 EP - 931 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Schultze, Joachim W. T1 - Measuring seven parameters by two ISFET modules in a microcell set-up JF - Int. Journal of Computational Engineering Science. 4 (2003), H. 2 Y1 - 2003 SN - 1465-8763 SP - 257 EP - 260 ER - TY - JOUR A1 - Gasparyan, Ferdinand V. A1 - Poghossian, Arshak A1 - Vitusevich, Svetlana A. A1 - Petrychuk, Mykhaylo V. A1 - Sydoruk, Viktor A. A1 - Siqueira, José R. Jr. A1 - Oliveira, Osvaldo N. Jr. A1 - Offenhäusser, Andreas A1 - Schöning, Michael Josef T1 - Low-Frequency Noise in Field-Effect Devices Functionalized With Dendrimer/Carbon-Nanotube Multilayers JF - IEEE Sensors Journal. 11 (2011), H. 1 Y1 - 2011 SN - 1530-437X SP - 142 EP - 149 PB - IEEE CY - New York ER -