TY  - CHAP
A1  - Poghossian, Arshak
A1  - Schumacher, Kerstin
A1  - Kloock, Joachim P.
A1  - Rosenkranz, Christian
A1  - Schultze, Joachim W.
A1  - Müller-Veggian, Mattea
A1  - Schöning, Michael Josef
T1  - Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
N2  - A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.
KW  - Biosensor
KW  - Biosensorik
KW  - ISFET
KW  - Wafer
KW  - ISFET
KW  - wafer-level testing
KW  - capillary micro-droplet cell
Y1  - 2006
U6  - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1259
ER  - 
TY  - JOUR
A1  - Poghossian, Arshak
A1  - Thust, M.
A1  - Schöning, Michael Josef
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Cross-sensitivity of a capacitive penicillin sensor combined with a diffusion barrier
JF  - Sensors and Actuators B. 68 (2000), H. 1-3
Y1  - 2000
SN  - 0925-4005
SP  - 260
EP  - 265
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, Jürgen
A1  - Zander, Willy
A1  - Müller-Veggian, Mattea
T1  - Pulsed laser deposition as a novel preparation technique for chemical microsensors
JF  - Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999)
Y1  - 1999
SP  - 124
EP  - 134
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, Anette
A1  - Ruge, Christian
A1  - Ecken, Holger
A1  - Müller-Veggian, Mattea
A1  - Lüth, Hans
T1  - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer
JF  - Sensors. 2 (2002), H. 1
N2  - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.
Y1  - 2002
SN  - 1424-8220
U6  - http://dx.doi.org/10.3390/s20100011
SP  - 11
EP  - 22
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
T1  - A novel silicon-based sensor array with capacitive EIS structures
JF  - Sensors and Actuators B. 47 (1998), H. 1-3
Y1  - 1998
SN  - 0925-4005
SP  - 225
EP  - 230
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Ruge, C.
A1  - Müller-Veggian, Mattea
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - A long-term stable macroporoustype EIS structure for electrochemical sensor applications
JF  - Sensors and Actuators B. 91 (2003), H. 1-3
Y1  - 2003
SN  - 0925-4005
SP  - 21
EP  - 25
ER  - 
TY  - JOUR
A1  - Streun, M.
A1  - Chavan, U.
A1  - Lame, H.
A1  - Parl, C.
A1  - Müller-Veggian, Mattea
A1  - Ziemons, Karl
T1  - Treating the Gain Non-Uniformity of Multi Channel PMTs by Channel-Specific Trigger Levels
JF  - 2006 IEEE Nuclear Science Symposium Conference Record, Vol. 2.
Y1  - 2006
SN  - 1082-3654
SP  - 1301
EP  - 1304
CY  - San Diego, CA
ER  - 
TY  - JOUR
A1  - Thust, M.
A1  - Poghossian, Arshak
A1  - Schöning, Michael Josef
A1  - Naser, S.
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Crosssensitivity of a capacitive penicillin sensor combined with a diffusion barrier
JF  - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1.
Y1  - 1999
SN  - 90-76699-02-X
N1  - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague)
SP  - 573
EP  - 576
CY  - The Hague, The Netherlands
ER  - 
TY  - JOUR
A1  - Thust, M.
A1  - Poghossian, Arshak
A1  - Schöning, Michael Josef
A1  - Naser, S.
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Cross-sensitivity of a capacitive penicillin sensor combined with a diffusion barrier
JF  - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. - Vol 1.
Y1  - 1999
SN  - 90-76699-02-X
N1  - Eurosensors <13, 1999, 's-Gravenhage> ; Eurosensors <13, 1999, The Hague> ;  European Conference on Solid-State Transducers <13, 1999, The Hague>
SP  - 573
EP  - 576
CY  - The Hague, The Netherlands
ER  - 
TY  - JOUR
A1  - Thust, M.
A1  - Schroth, P.
A1  - Töpler, A.
A1  - Schöning, Michael Josef
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Improving the detection limit of a capacitive sensor by means of a diffusion barrier
JF  - Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998 / ed. by N. M. White ; Vol. 1
Y1  - 1998
SN  - 0-7503-0595-9
N1  - Eurosensors ; (12, 1998, Southampton) ; UK Conference on Sensors and Their Applications ; (9, 1998, Southampton)
SP  - 507
EP  - 510
PB  - Inst. of Physics Publ.
CY  - Bristol [u.a.]
ER  - 
TY  - JOUR
A1  - Ziemons, Karl
A1  - Achten, R.
A1  - Auffray, E.
A1  - Müller-Veggian, Mattea
T1  - The ClearPET™ neuro scanner: a dedicated LSO/LuYAP phoswich small animal PET scanner
JF  - 2004 IEEE Nuclear Science Symposium conference record : Nuclear Science Symposium, Medical Imaging Conference ; 16 - 22 October 2004, Rome, Italy ; [including the Symposium on Nuclear Power System (SNPS), 14th Room Temperature Semiconductor X- and Gamma-Ray Detectors Workshop and special focus workshops] / NPSS, Nuclear & Plasma Sciences Society. Guest ed.: J. Anthony Seibert
Y1  - 2004
SN  - 1082-3654
N1  - Nuclear Science Symposium Conference Record, 2004 IEEE
SP  - 2430
EP  - 2433
PB  - IEEE Operations Center
CY  - Piscataway, NJ
ER  -