TY - JOUR A1 - Prume, Klaus A1 - Tyholdt, F. A1 - Calame, F. A1 - Raeder, H. T1 - Chemically derived seeding layer for {100}-textured PZT thin films / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P. JF - Journal of Electroceramics. 19 (2007), H. 4 Y1 - 2007 SN - 1385-3449 SP - 311 EP - 314 ER - TY - JOUR A1 - Prume, Klaus A1 - Raeder, H. A1 - Tyholdt, F. A1 - Booij, W. E. T1 - Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P. JF - Journal of Electroceramics. 19 (2007), H. 4 Y1 - 2007 SN - 1385-3449 SP - 357 EP - 362 ER -