TY - GEN A1 - Kämper, Klaus-Peter T1 - Lecture notes Sensors and Actuators WS 2008/2009 N2 - Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter Kämper. Winter semester 2008/2009. 488 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids 14. Index N2 - Kennwortgeschützter Zugang nur für Studierende bei Prof. Dr. Klaus-Peter Kämper. Wintersemester 2008/2009. 488 Seiten (pdf-Format) KW - Sensor KW - Aktor KW - Sensoren KW - Aktoren KW - Sensores KW - Actuators KW - Microfabrication Y1 - 2008 ER - TY - JOUR A1 - Gebhardt, Andreas A1 - Schmidt, Frank-Michael T1 - Practical experiences with making and finishing of coloured models using 3D printing Y1 - 2002 N1 - International Conference on Rapid Prototyping and Manufacturing <2, 2002, Beijing> ER - TY - BOOK A1 - Gebhardt, Andreas T1 - Rapid prototyping : Werkzeug für die schnelle Produktentstehung. - 2., völlig überarb. Aufl. Y1 - 2000 SN - 3-446-21242-6 PB - Hanser CY - München [u.a.] ER - TY - BOOK A1 - Gebhardt, Andreas T1 - Rapid Prototyping Y1 - 2003 SN - 3-446-21259-0 PB - Hanser CY - Munich [u.a.] ER - TY - JOUR A1 - Gebhardt, Andreas T1 - Rapid Prototyping and PIV Y1 - 2001 N1 - Workshop on Industrial Applications of Particle Image Velocimetry <2001, Köln> ER - TY - JOUR A1 - Gebhardt, Andreas T1 - Laserwelding with fillerwire JF - LIA handbook of laser material processing / Laser Institute of America Y1 - 2001 SN - 3-540-41770-2 N1 - Chapter 11.2.12 CY - Orlando, Florida ER - TY - BOOK A1 - Engeln-Müllges, Gisela A1 - Uhlig, Frank T1 - Numeric Algorithms with Fortran Y1 - 1996 SN - 3-540-60529-0 PB - Springer CY - Berlin [u.a.] ER - TY - BOOK A1 - Engeln-Müllges, Gisela A1 - Uhlig, Frank T1 - Numerical algorithms with C Y1 - 1996 SN - 3-540-60530-0 PB - Springer CY - Berlin [u.a.] ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Kurzawa, R. A1 - Schmitt, W. A1 - Güntherodt, G. T1 - Spin-resolved photoemission study of in situ grown epitaxial Fe layers on W(110). Kurzawa, R.; Kämper, K.-P.; Schmitt, W.; Güntherodt, G. JF - Solid State Communications. 60 (1986), H. 10 Y1 - 1986 SN - 0038-1098 SP - 777 EP - 780 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Picard, Antoni A1 - Brill, Manfred A1 - Cassel, Detlef (u.a.) T1 - The Virtual Cleanroom – a new tool in teaching MST process technologies JF - mst news International newsletter on micro - nano Integration (2003) Y1 - 2003 SN - 0948-3128 SP - 35 EP - 36 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Berg, U. A1 - Begemann, M. A1 - Hagemann, B. (u.a.) T1 - Series production and testing of a micro motor. Serienfertigung und Prüfung eines Mikromotors JF - Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ... Y1 - 1998 SN - 3-933339-00-6 N1 - Konferenz-Einzelbericht: ACTUATOR, Internat. Conf. on New Actuators SP - 552 EP - 555 PB - Messe Bremen CY - Bremen ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Clemens, M. A1 - Ehrfeld, W. T1 - Micro gear pumps for dosing of viscous fluids. / Döpper, J. (u.a.) JF - Journal of Micromechanics and Microengineering. 7 (1997), H. 3 Y1 - 1997 SN - 0960-1317 SP - 230 EP - 232 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Abel, S. A1 - Döpper, J. T1 - Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren für Mikroroboter / Lehr, H.; Abel, S.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulu, c.; Thürigen, C. JF - Proceedings of the SPIE - The International Society for Optical Engineering Y1 - 1996 SN - 0277-786X N1 - Konferenz-Einzelbericht. SP - 202 EP - 210 ER - TY - JOUR A1 - Kämper, Klaus-Peter T1 - Development of low-cost injection moulded micropumps. Entwicklung von kostengünstigen, mittels Spritzguß hergestellten Mikropumpen / Döpper, J. (u.a.) JF - Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH Y1 - 1996 N1 - Konferenz-Einzelbericht: ACTUATOR, Internat. Conf. on New Actuators, 5 SP - 37 EP - 40 CY - Bremen ER - TY - JOUR A1 - Gebhardt, Andreas T1 - Rapid Prototyping JF - Landolt-Börnstein - Group VIII Advanced Materials and Technologies‡Vol. 1 Laser Physics and Applications‡Subvol. C Laser Applications / authors: Bäuerle, D. ... Y1 - 2004 SN - 3-540-00105-0 SP - 105 EP - 123 PB - Heidelberg CY - Springer ER - TY - JOUR A1 - Grundmann, Reinhard T1 - Design Criteria for Aeroacoustic Wind Tunnels Y1 - 1992 N1 - Konferenzeinzelbericht : DGLR-workshop : Joint meeting of the Specialists Groups Test Facilities/Aeroacoustics - Flight Noise . Deutsche Gesellschaft für Luft- und Raumfahrt. Test Facilities Specialist Group ; Deutsche Gesellschaft für Luft- und Raumfahr ER - TY - JOUR A1 - Heinrichs, Horst A1 - Weck, H. T1 - Efficient finite-element structural analysis by interactive graphic mesh generation JF - CIRP Annals. 30 (1981), H. 1 Y1 - 1981 SP - 279 EP - 284 ER - TY - JOUR A1 - Starke, Günther A1 - Kuhne, A.H. A1 - Frassek, B. T1 - Components for the automated GMAW process. Bestandteile des automatischen Metall-Schutzgas-Schweissverfahrens JF - Welding Journal. 63 (1984), H. 1 Y1 - 1984 SN - 0043-2296 SP - 31 EP - 34 ER - TY - JOUR A1 - Starke, Günther A1 - Drews, P. T1 - Le soudage au siecle de l'informatique JF - Souder. 18 (1994), H. 6 Y1 - 1994 SN - 0246-1900 SP - 33 EP - 44 ER - TY - JOUR A1 - Starke, Günther T1 - Welding in the century of information technology. Session 1 JF - Welding in the World. 34 (1994), H. 9 Y1 - 1994 SN - 0043-2288 SP - 1 EP - 20 ER - TY - JOUR A1 - Starke, Günther A1 - Drews, P. T1 - Development approaches for advanced control in automated arc welding Y1 - 1985 N1 - Konferenz-Einzelbericht: Automation and robotisation in welding and allied processes. International conference on automation and robotisation in welding and allied processes, Strasbourg, FR, 02.09.1985-03.09.1985 SP - 115 EP - 124 ER - TY - JOUR A1 - Klocke, Martina T1 - Study Units in the CIM-Oriented Study Factory JF - Qualification for Computer-Integrated Manufacturing. Hrsg.: Felix Rauner Y1 - 1995 SN - 3-540-19971-3 SP - 38 EP - 51 PB - Springer CY - Berlin [u.a.] ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Güntherodt, G. A1 - Gambino, R. J. T1 - CrO2—A New Half-Metallic Ferromagnet? Kämper, K.-P.; Schmitt, W.; Güntherodt, G.; Gambino, R. J., Ruf, R. JF - Physical Review Letters. 59 (1987), H. 24 Y1 - 1987 SN - 1079-7114 SP - 2788 EP - 2791 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Pappas, D. P. A1 - Hopster, H. T1 - Reversible transition between perpendicular and in-plane magnetization in ultrathin films. Pappas, D. P.; Kämper, K.-P.; Hopster, H. JF - Physical Review Letters. 64 (1990), H. 26 Y1 - 1990 SN - 1079-7114 SP - 3179 EP - 3182 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Pappas, D. P. A1 - Miller, B. P. A1 - Hopster, H. T1 - Spin-dependent electron attenuation by transmission through thin ferromagnetic films . Pappas, D. P.; Kämper,K.-P.; Miller, B. P.; Hopster, H.; Fowler, D. E.; Brundle, C. R.; Luntz, A. C.; Shen, Z.-X. JF - Physical Review Letters. 66 (1991), H. 4 Y1 - 1991 SN - 1079-7114 SP - 504 EP - 507 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Güntherodt, G. T1 - The influence of adsorbates on the spin-resolved photoemission of Ni(110). Schmitt, W.; Kämper, K.-P.; Güntherodt, G. JF - Surface Science. 189/190 (1987) Y1 - 1987 SN - 0039-6028 N1 - Proceedings of the Ninth European Conference on Surface Science SP - 741 EP - 507 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Wesner, D. A. A1 - Güntherodt, G. T1 - Thickness dependence of the spin- and angle-resolved photoemission of ultrathin, epitaxial Ni(111)/W(110) layers JF - Applied Physics A: Materials Science and Processing. 49 (1989), H. 6 Y1 - 1989 SN - 1432-0630 SP - 573 EP - 578 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Pappas, D. P. A1 - Miller, B. P. A1 - Hopster, H. T1 - Magnetism of ultrathin films of Fe on Cu(100). Pappas, D. P; Kämper, K.-P.; Miller, B. P.; Hopster, H.; Fowler, D. E.; Luntz, A. C.; Brundle, C.R.; Shen, Z.-X. JF - Journal of Applied Physics. 69 (1991), H. 8 Y1 - 1991 SN - 1089-7550 SP - 5209 EP - 521 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Abel, S. A1 - Ehrfeld, W. T1 - Assembly of Electromagnetic Milliactuators with LIGA Components. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Thürigen, C. JF - Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994) Y1 - 1995 N1 - 2nd Japan-France Congress on mechatronics (1994 Nov : Takamatsu, Japan) SP - 31 EP - 31 PB - Fuji Technology Press ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Ehrfeld, W. A1 - Michel, F. T1 - LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.; Schmidt, M. JF - 1994 IEEE Symposium on Emerging Technologies & Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN Y1 - 1994 SN - 0780321146 SP - 43 EP - 47 CY - Piscataway, N.J. ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Güntherodt, G. T1 - Effect of adsorbates on the spin-polarized photoemission of itinerant ferromagnets. Schmitt, W.; Kämper, K.-P.; Güntherodt, G. JF - Physical Review B. 36 (1987), H. 7 Y1 - 1987 SN - 1095-3795 SP - 3763 EP - 3768 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Güntherodt, G. T1 - Thickness dependence of the electronic structure of ultrathin, epitaxial Ni(111)/W(110) layers. JF - Physical Review B. 38 (1988), H. 14 Y1 - 1988 SN - 1095-3795 SP - 9451 EP - 9456 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Güntherodt, G. T1 - Temperature and wave-vector dependence of the spin-split band structure of Ni(111) along the Γ-L line JF - Physical Review B. 42 (1990), H. 16 Y1 - 1990 SN - 1095-3795 SP - 10696 EP - 10705 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Abraham, D. L. A1 - Hopster, H. T1 - Spin-polarized electron-energy-loss spectroscopy on epitaxial fcc Co layers on Cu(001) JF - Physical Review B. 45 (1992), H. 24 Y1 - 1992 SN - 1095-3795 SP - 14335 EP - 14346 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Döpper, J. A1 - Hessel, V. T1 - Microfluidic components for biological and chemical microreactors. Kämper, K.-P.; Ehrfeld, W.; Döpper, J.; Hessel, V.; Lehr, H.; Löwe, H.; Richter, T.; Wolf, A. JF - Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ... Y1 - 1997 SN - 0-7803-3744-1 N1 - International Workshop on Micro-Electro-Mechanical Systems <10, 1997, Nagoya> SP - 338 EP - 343 PB - IEEE Service Center CY - Piscataway, NJ ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Hessel, V. A1 - Lacher, M. T1 - Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C. JF - Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1 Y1 - 1997 SN - 0-7803-3664-X SP - 71 EP - 79 PB - IEEE Service Center CY - Piscataway, NJ ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Ehrfeld, W. A1 - Hagemann, B. T1 - Development of micro and millimotors. Lehr, H.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulz, C.; Thürigen C. JF - Minimally Invasive Therapy and Allied Technologies. 6 (1997) Y1 - 1997 SN - 1364-5706 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Ehrfeld, W. A1 - Oberbeck, S. T1 - A self-filling low-cost membrane micropump JF - Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division Y1 - 1998 SN - 078034412X N1 - International Workshop on Micro-Electro-Mechanical Systems <11, 1998, Heidelberg> SP - 432 EP - 437 PB - IEEE Service Center CY - Piscataway, NJ ER - TY - JOUR A1 - Kämper, Klaus-Peter T1 - Education and Training in MST. Kämper, K.-P.; Picard, A.; Brill, M.; Cassel, D.; Jentsch, A.; Merten, S.; Rollwa, M. JF - Mst-News (2003) Y1 - 2003 SN - 0948-3128 SP - 35 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schulz, C. A1 - Ehrfeld, W. A1 - Erbel, R. T1 - LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; Kämper, K.-P.; Koch, L.; Lehr, H.; Roth, T. JF - 3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...] Y1 - 1994 N1 - Microengineering in Medicine and Biology Training Course 1994, Lausanne PB - REPRO EPFL CY - Lausanne ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Picard, A. A1 - Schütze, A. A1 - Wallach, D. T1 - Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; Kämper, K.-P.; Schütze, A.; Wallach, D.; Walter, T. JF - Mst-News (2006) Y1 - 2006 SN - 0948-3128 SP - 15, 16 EP - u. 35 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Ehrfeld, W. A1 - Hagemann, B. T1 - Simulation supported design of LIGA Microsystems. Kämper, K.-P.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H. JF - Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey Y1 - 1995 SN - 1-85312-390-0 SP - 3 EP - 10 PB - Computational Mechanics Publ. CY - Southampton [u.a.] ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Ehrfeld, W. A1 - Hagemann, B. T1 - An investigation of computer modelling for micro-injection moulding. Hill, S.D.J.; Kämper, K.-P.; Dasbach, U.; Döpper, J.; Ehrfeld, W.; Kaupert, M. JF - Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey Y1 - 1995 SN - 1-85312-390-0 SP - 275 PB - Computational Mechanics Publ. CY - Southampton [u.a.] ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Hagemann, B. A1 - Lehr, H. T1 - Electromagnetic permanent magnet micromotor with integrated micro gear box. Kämper, K.-P.; Ehrfeld, W.; Hagemann, B.; Lehr, H.; Michel, F.; Schirling, A.; Thürigen, C.; Wittig, T. JF - Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH Y1 - 1996 N1 - International Conference on New Actuators <5, 1996, Bremen> SP - 429 CY - Bremen ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Abraham, M. A1 - Ehrfeld, W. A1 - Hessel, V. T1 - Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A. JF - Microelectronic Engineering. 41-42 (1998) Y1 - 1998 SN - 0167-9317 N1 - International Conference on Micro- and Nanofarbication SP - 47 EP - 52 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Güntherodt, G. T1 - Temperature dependence of the exchange splitting of Ni along the -L line JF - Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8 Y1 - 1988 N1 - Proceedings of the International conference on Magnetism. Part 1. ICM 88, Paris, France, Juli 25-29, 1988 SP - 39 EP - 40 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Hagemann, B. A1 - Lehr, H. A1 - Michel, F. T1 - LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F.; Thürigen, C. JF - LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed. Y1 - 1995 N1 - University Enterprise Training Partnership for Micro-Electro-Mechanical Systems SP - 100 EP - 110 PB - FSRM CY - Neuchatel ER - TY - JOUR A1 - Hanrath, Wilhelm T1 - Character tables of some factor groups of space groups JF - Perfect groups / Derek F. Holt and W. Plesken Y1 - 1989 SN - 0-19-853559-7 SP - 357 EP - 359 PB - Clarendon Press CY - Oxford ER - TY - JOUR A1 - Hanrath, Wilhelm A1 - Plesken, Wilhelm T1 - Group rings and irreducible representations of space groups / by W. Hanrath and W. Plesken JF - Journal für die reine und angewandte Mathematik. 362 (1985) Y1 - 1985 SN - 0075-4102 SP - 130 EP - 140 ER - TY - JOUR A1 - Hanrath, Wilhelm A1 - Plesken, Wilhelm T1 - The lattices of six-dimensional euclidean space JF - Mathematics of computation. 43 (1984), H. 168 Y1 - 1984 SN - 0025-5718 SP - 573 EP - 587 ER -