TY - CHAP A1 - Näther, Niko A1 - Poghossian, Arshak A1 - Platen, J. A1 - Yoshinobu, T. A1 - Koudelka-Hep, M. A1 - Schöning, Michael Josef T1 - Multi-parameter sensing of both physical and (bio-)chemical quantities using the same transducer principle T2 - Biochemical sensing utilisation of micro- and nanotechnologies : Warsaw, [23rd - 26th] November 2005 / ed. by M. Mascini ... Y1 - 2006 SP - 172 EP - 181 CY - Warsaw ER - TY - CHAP A1 - Schöning, Michael Josef A1 - Abouzar, Maryam H. A1 - Wagner, Torsten A1 - Näther, Niko A1 - Rolka, David A1 - Yoshinobu, Tatsuo A1 - Kloock, Joachim P. A1 - Turek, Monika A1 - Ingebrandt, Sven A1 - Poghossian, Arshak T1 - A semiconductor-based field-effect platform for (bio-)chemical and physical sensors: From capacitive EIS sensors and LAPS over ISFETs to nano-scale devices T2 - MRS Proceedings Y1 - 2006 U6 - http://dx.doi.org/10.1557/PROC-0952-F08-02 N1 - Vol. 952 - Symposium F - Integrated Nanosensors SP - 1 EP - 9 ER - TY - CHAP A1 - Schöning, Michael Josef A1 - Abouzar, Maryam H. A1 - Han, Y. A1 - Ingebrandt, S. A1 - Offenhäusser, A. A1 - Poghossian, Arshak T1 - Markierungsfreie DNA-Detektion mit Silizium-Feldeffektsensoren – Messeffekte oder Artefakte? T2 - Sensoren und Mess-Systeme 2006 : Vorträge der 13. ITG/GMA-Fachtagung vom 13. bis 14.3.2006 in Freiburg/Breisgau Y1 - 2006 SN - 3-8007-2939-3 SP - 443 EP - 446 PB - VDE Verl. CY - Berlin ER - TY - CHAP A1 - Platen, J. A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Präparation von selbstjustierenden Nanostrukturen mittels Schichtausdehnungstechnik T2 - Sensoren und Mess-Systeme 2006 : Vorträge der 13. ITG/GMA-Fachtagung vom 13. bis 14.3.2006 in Freiburg/Breisgau Y1 - 2006 SN - 3-8007-2939-3 SP - 277 EP - 280 PB - VDE Verl. CY - Berlin ER - TY - CHAP A1 - Poghossian, Arshak A1 - Schumacher, Kerstin A1 - Kloock, Joachim P. A1 - Rosenkranz, Christian A1 - Schultze, Joachim W. A1 - Müller-Veggian, Mattea A1 - Schöning, Michael Josef T1 - Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell N2 - A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors. KW - Biosensor KW - Biosensorik KW - ISFET KW - Wafer KW - ISFET KW - wafer-level testing KW - capillary micro-droplet cell Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1259 ER - TY - CHAP A1 - Platen, Johannes A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique N2 - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures. KW - Biosensor KW - Nanostructuring KW - layer expansion KW - pattern-size reduction KW - self-aligned patterning Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477 ER - TY - CHAP A1 - Poghossian, Arshak A1 - Ingebrandt, S. A1 - Platen, J. A1 - Schöning, Michael Josef T1 - Field-effect sensors with charged macromolecules – from micro towards nano aspects T2 - Biochemical Sensing Utilisation of Micro-and Nanotechnologies, Warschau, Nov. 2005 : Lecture Notes of the ICB Seminar / ed.: M. Mascini, W. Torbicz Y1 - 2006 SP - 74 EP - 81 PB - Polish Academy Sciences Press CY - Warsaw ER -