TY  - JOUR
A1  - Poghossian, Arshak
A1  - Berndsen, L.
A1  - Schultze, J. W.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - „High order“ hybrid sensor module based on an identical transducer principle
JF  - Chemical and biological sensors and analytical methods : proceedings of the international symposium / Sensor, Physical Electrochemistry, and Organic and Biological Electrochemistry Divisions. Ed.: M. Butler
Y1  - 2001
SN  - 1-56677-351-2
N1  - International Symposium: Chemical and Biological Sensors and Analytical Methods ; (2 : 2001.)
SP  - 143
EP  - 152
PB  - Electrochemical Society
CY  - Pennington, NJ
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Hüllenkremer, B.
A1  - Glück, O.
A1  - Lüth, H.
A1  - Emons, H.
T1  - Voltohmmetry – a novel sensing principle for heavy metal determination in aqueous solutions
JF  - Sensors and Actuators B. 78 (2001), H. 1-3
Y1  - 2001
SN  - 0925-4005
SP  - 275
EP  - 280
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TY  - JOUR
A1  - Hüllenkremer, B.
A1  - Glück, O.
A1  - Emons, H.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Voltohmmetrie an polykristallinen Goldelektroden
JF  - Gesellschaft Mess- und Automatisierungstechnik: Sensoren und Meßsysteme 2000 : Tagung Ludwigsburg, 13. und 14. März 2000 / VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik
Y1  - 2000
SN  - 3-18-091530-7
N1  - VDI-Berichte; 1530
SP  - 45
EP  - 54
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CY  - Düsseldorf:
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TY  - JOUR
A1  - Mikulics, M.
A1  - Adam, R.
A1  - Kordos, P.
A1  - Förster, Arnold
A1  - Lüth, H.
A1  - Wu, S.
A1  - Zheng, X.
A1  - Sobolewski, R.
T1  - Ultrafast low-temperature-grown epitaxial GaAs photodetectors transferred on flexible plastic substrates
JF  - IEEE photonics technology letters : IEEE PTL. 17 (2005), H. 8
Y1  - 2005
SN  - 1041-1135
SP  - 1725
EP  - 1727
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TY  - JOUR
A1  - Vitusevich, S. A.
A1  - Förster, Arnold
A1  - Indlekofer, K.-M.
A1  - Lüth, H.
A1  - Belyaev, A. E.
A1  - Glavin, B. A.
A1  - Konakova, R. V.
T1  - Tunneling Through X-Valley-Related Impurity States in GaAs/AlAs Resonant-Tunneling Diodes
JF  - Physical  Review . B. 61 (2000), H. 16
Y1  - 2000
SN  - 1550-235X
SP  - 10898
EP  - 10904
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TY  - JOUR
A1  - Förster, Arnold
A1  - Griebel, M.
A1  - Indlekofer, M.
A1  - Lüth, H.
T1  - Transport through a buried double barrier single electron transistor at low temperatures
JF  - Physica E: Low-dimensional Systems and Nanostructures. 2 (1998), H. 1-4
Y1  - 1998
SN  - 1386-9477
SP  - 502
EP  - 506
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TY  - JOUR
A1  - Förster, Arnold
A1  - Griebel, M.
A1  - Indlekofer, K. M.
A1  - Lüth, H.
T1  - Transport properties of gated resonant tunneling diodes in the single electron regime. Griebel, M.; Indlekofer,  K. M.; Förster, A.; Lüth, H.
JF  - Journal of Applied Physics. 84 (1998), H. 12
Y1  - 1998
SN  - 1089-7550
SP  - 6719
EP  - 6724
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TY  - JOUR
A1  - Glück, O.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Emons, H.
A1  - Hanewinkel, C.
A1  - Schumacher, D.
A1  - Otto, A.
T1  - Trace metal determination with gold microelectrodes fabricated by silicon technology
JF  - Proceedings of the 11th European Conference on Solid-State Transducers / Eurosensors XI, September 21 - 24, 1997, Warsaw, Poland. [Organised by] Warsaw University of Technology. Vol 2.
Y1  - 1997
SN  - 83-908335-0-6
N1  - Eurosensors ; (11, 1997, Warszawa) ; Eurosensors - European Conference on Solid-State Transducers ; (11 : ; 1997.09.21-24 : ; Warsaw)
SP  - 615
EP  - 618
PB  - Sensor Lab Sp.
CY  - Warsaw
ER  - 
TY  - JOUR
A1  - Glück, O.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Otto, A.
A1  - Emons, H.
T1  - Trace metal determination by dc resistance changes of microstructured thin gold film electrodes
JF  - Electrochimica Acta. 44 (1999), H. 21-22
Y1  - 1999
SN  - 0013-4686
SP  - 3761
EP  - 3768
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TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schmidt, C.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Mesters, S.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Legin, A.
A1  - Seleznev, B.
A1  - Vlasov, Y. G.
T1  - Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique
JF  - Sensors and Actuators B. 68 (2000), H. 1-3
Y1  - 2000
SN  - 0925-4005
SP  - 254
EP  - 259
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TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schmidt, C.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Legin, A.
A1  - Seleznev, B.
A1  - Vlasov, Y. G.
T1  - Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique
JF  - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1.
Y1  - 1999
SN  - 90-76699-02-X
N1  - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague)
SP  - 847
EP  - 850
CY  - The Hague, The Netherlands
ER  - 
TY  - JOUR
A1  - Mourzina, Yu.G.
A1  - Schöning, Michael Josef
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Thin film microsensors for fast heavy metal analysis
JF  - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]
Y1  - 2000
SN  - 87-89935-50-0
N1  - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen)
SP  - 839
EP  - 840
PB  - MIC, Mikroelektronik Centret
CY  - Lyngby, Denmark
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Glück, O.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Emons, H.
T1  - Thin film electrodes for trace metal analysis by dc resistance changes
JF  - Proceedings of SPIE. 3857 (1999)
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TY  - JOUR
A1  - Mourzina, Y. G.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Schöning, Michael Josef
A1  - Schubert, J.
A1  - Zander, W.
A1  - Lüth, H.
T1  - Thin film chemical sensors based on chalcogenide glasses for „electronic tongue“ applications
JF  - Sensor 2001 : 10th international conference, May 8 - 10, 2001, Exhibition Centre Nuremberg, Germany ; proceedings
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EP  - 141
PB  - AMA Service
CY  - Wunstorf
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A1  - Förster, Arnold
A1  - Tulke, A.
A1  - Lüth, H.
T1  - The Schottky barrier at the InSb(110)–Sn interface
JF  - Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 5 (1987), H. 4
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A1  - Schütz, S.
A1  - Hummel, Hans E.
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A1  - Kohl, C.-D.
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T1  - The future of fire detection: Biological sensors? – Die Zukunft der Brandgassensorik: Biologische Sensoren?
JF  - Gassensorik in der Brandmeldetechnik : [VdS-Fachtagung, am 15. und 16. November 2000 in Köln] = Gas sensors for fire detection / VdS Schadenverhütung
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EP  - 7
PB  - VdS Schadenverhütung
CY  - Köln
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A1  - Förster, Arnold
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T1  - The effect of inhomogeneous dopant profiles on the electron energy loss spectra of Si(100) /
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SN  - 0947-8396
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A1  - Förster, Arnold
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A1  - Lüth, H.
T1  - The adsorption of fluor-carbon complexes on GaAs(110) studied by electron energy loss spectroscopy
JF  - Surface Science. 172 (1986), H. 1
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T1  - Surface reactions of trimethylgallium and trimethylarsenic on silicon surfaces
JF  - Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 7 (1989), H. 4
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SN  - 1071-1023
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A1  - Simonis, A.
A1  - Lüth, H.
A1  - Wang, J.
A1  - Schöning, Michael Josef
T1  - Strategies of miniaturised reference electrodes integrated in a silicon-based „one chip“ pH sensor
JF  - Sensors. 3 (2003), H. 9
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A1  - Vitusevich, S. A.
A1  - Förster, Arnold
A1  - Reetz, W.
A1  - Lüth, H.
A1  - Belyaev, A. E.
A1  - Danylyuk, S. V.
T1  - Spectral Responsivity of single-quantum-well photodetectors
JF  - Applied Physics Letters. 77 (2000), H. 1
Y1  - 2000
SN  - 1077-3118
SP  - 16
EP  - 18
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A1  - Vlasov, Y. G.
A1  - Mourzina, Y. G.
A1  - Legin, A. V.
A1  - Ermelenko, Y. E.
A1  - Schubert, J.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
T1  - Solid-state thin film sensors based on chalcogenide materials prepared by planar technology and pulsed laser deposition
JF  - Russian Journal of Applied Chemistry. 75 (2002), H. 3
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SN  - 1070-4272
SP  - 351
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A1  - Förster, Arnold
A1  - Griebel, M.
A1  - Indlekofer, K.M.
A1  - Lüth, H.
T1  - Single electron transport in resonant tunnelling diodes laterally confined by ion implantation. Griebel, M.; Indlekofer, K.M.; Förster, A.; Lüth, H.
JF  - Journal of  Physics D: Applied  Physics. 32 (1999), H. 14
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SN  - 1361-6463
SP  - 1729
EP  - 1733
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A1  - Glück, O.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Emons, H.
A1  - Otto, A.
T1  - Schwermetallbestimmung mittels Widerstandsmessungen und Voltammetrie an Dünnschichtelektroden
JF  - Chemie- und Biosensoren : aktuelle Anwendungen und Entwicklungstrends / 3. Dresdner Sensor-Symposium, 8. - 10. Dezember 1997, Dresden-Radebeul. J. P. Baselt ... (Hg.)
Y1  - 1998
SN  - 3-933168-03-1
N1  - Serie Dresdner Beiträge zur Sensorik ; 5
SP  - 165
EP  - 168
PB  - Dresden Univ. Press
CY  - Dresden ; München
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TY  - JOUR
A1  - Förster, Arnold
A1  - Wensorra, J.
A1  - Indlekofer, K. M.
A1  - Lüth, H.
T1  - Resonant tunneling in nanocolumns improved by quantum collimation. Wensorra, J.; Indlekofer, K. M.; Förster, A.; Lüth, H.
JF  - Nano Letters. 5 (2005)
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SN  - 0587-4246
SP  - 2470
EP  - 2475
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A1  - Vitusevich, S. A.
A1  - Förster, Arnold
A1  - Lüth, H.
A1  - Belyaev, A. E.
A1  - Danylyuk, S. V.
A1  - Konakova, R. V.
A1  - Sheka, D. I.
T1  - Resonant spectroscopy of electric-field-induced superlattices
JF  - Journal of Applied Physics. 90 (2001), H. 6
Y1  - 2001
SN  - 1089-7550
U6  - http://dx.doi.org/10.1063/1.1392956
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A1  - Schöning, Michael Josef
A1  - Mourzina, Yu.G.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Pulsed laser deposition – an innovative technique for preparing inorganic thin films
JF  - Electroanalysis. 13 (2001), H. 8-9
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SN  - 1040-0397
SP  - 727
EP  - 732
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TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schaub, A.
A1  - Zundel, A.
A1  - Beckers, L.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Kordos, P.
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T1  - Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors
JF  - Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff
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SN  - 2-86332-182-X
N1  - ESSDERC ; (25, 1995, 's-Gravenhage) ; European Solid State Device Research Conference (ESSDERC) ; (25 : ; 1995.09.25-27 : ; Den Haag)
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EP  - 604
PB  - Ed. Frontières
CY  - Gif-sur-Yvette
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A1  - Thust, Marion
A1  - Schöning, Michael Josef
A1  - Frohnhoff, S.
A1  - Arens-Fischer, R.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Porous silicon as a substrate material for potentiometric biosensors
JF  - Measurement Science and Technology
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A1  - Mikulics, M.
A1  - Marso, M.
A1  - Cámara Mayorga, I.
A1  - Gusten, R.
A1  - Stancek, S.
A1  - Michael, E. A.
A1  - Schieder, R.
A1  - Wolter, M.
A1  - Buca, D.
A1  - Förster, Arnold
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T1  - Photomixers fabricated on nitrogen-ion-implanted GaAs
JF  - Applied physics letters. 87 (2005)
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SP  - 041106-1
EP  - 041106-3
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A1  - Poghossian, Arshak
A1  - Thust, M.
A1  - Schroth, P.
A1  - Steffen, A.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Penicillin detection by means of silicon-based field-effect structures
JF  - Sensors and Materials. 13 (2001), H. 4
Y1  - 2001
SN  - 0392-2510
SP  - 207
EP  - 223
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TY  - JOUR
A1  - Poghossian, Arshak
A1  - Yoshinobu, T.
A1  - Simonis, A.
A1  - Ecken, H.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Penicillin detection by means of field-effect based sensors: EnFET, capacitive EIS sensor or LAPS?
JF  - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]
Y1  - 2000
SN  - 87-89935-50-0
N1  - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen)
SP  - 27
EP  - 30
PB  - MIC, Mikroelektronik Centret
CY  - Lyngby, Denmark
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TY  - JOUR
A1  - Faßbender, F.
A1  - Schmitt, G.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Buß, G.
A1  - Schultze, J. W.
T1  - Passivation and corrosion of microsensor devices exemplified at microelectrode arrays
JF  - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1.
Y1  - 1999
SN  - 90-76699-02-X
N1  - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague)
SP  - 953
EP  - 956
CY  - The Hague, The Netherlands
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TY  - JOUR
A1  - Schmitt, G.
A1  - Schultze, J.-W.
A1  - Faßbender, F.
A1  - Buß, G.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Passivation and corrosion of microelectrode arrays
JF  - Electrochimica Acta. 44 (1999), H. 21-22
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SN  - 0013-4686
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EP  - 3883
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TY  - JOUR
A1  - Schmitt, G.
A1  - Faßbender, F.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
A1  - Schultze, J. W.
A1  - Buß, G.
T1  - Passivation and corrosion of microelectrode arrays
JF  - Materials and Corrosion. 51 (2000), H. 1
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SN  - 0947-5117
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EP  - 25
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TY  - JOUR
A1  - Faßbender, F.
A1  - Schmitt, G.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Buß, G.
A1  - Schultze, J. W.
T1  - Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays
JF  - Sensors and Actuators B. 68 (2000), H. 1-3
Y1  - 2000
SN  - 0925-4005
SP  - 128
EP  - 133
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TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Malkoc, Ü.
A1  - Thust, M.
A1  - Steffen, A.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors
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SN  - 0925-4005
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A1  - Schöning, Michael Josef
A1  - Malkoc, Ü.
A1  - Thust, M.
A1  - Steffen, A.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors
JF  - Proceedings of the Seventh International Meeting on Chemical Sensors : 27 - 30 July, 1998, Beijing, P. R. China / ed. Zhi-Gang Zhou
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N1  - International Meeting on Chemical Sensors ; (7, 1998, Beijing) ; International Meeting on Chemical Sensors (IMCS) ; (7 : ; 1998.07.27-30 : ; Beijing)
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EP  - 887
PB  - Elsevier
CY  - Amsterdam [u.a.]
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TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Lüth, H.
T1  - Novel concepts for silicon-based biosensors
JF  - Physica Status Solidi (A) (2001)
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SN  - 0031-8965
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A1  - Simonis, A.
A1  - Lüth, H.
A1  - Wang, J.
A1  - Schöning, Michael Josef
T1  - New concepts of miniaturised reference electrodes in silicon technology for potentiometric sensor systems
JF  - Sensors and Actuators B. 103 (2004), H. 1-2
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A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Thust, M.
T1  - Neue Ansätze für Chemo- und Biosensoren in Siliziumtechnik
JF  - Physikalische Blätter. 53 (1997), H. 5
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A1  - Schöning, Michael Josef
A1  - Schütz, S.
A1  - Steffen, A.
A1  - Weißbecker, B.
A1  - Hummel, Hans E.
A1  - Kordos, P.
A1  - Lüth, H.
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JF  - Gesellschaft Mess- und Automatisierungstechnik: Sensoren und Meßsysteme 2000 : Tagung Ludwigsburg, 13. und 14. März 2000 / VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik
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SN  - 3-18-091530-7
N1  - VDI-Berichte; 1530
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PB  - VDI-Verl.
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A1  - Schubert, J.
A1  - Schöning, Michael Josef
A1  - Mourzina, Y. G.
A1  - Legin, A. V.
A1  - Vlasov, Y. G.
A1  - Zander, W.
A1  - Lüth, H.
T1  - Multicomponent thin films for electrochemical sensor applications prepared by pulsed laser deposition
JF  - Sensors and Actuators B. 76 (2001), H. 1-3
Y1  - 2001
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EP  - 330
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A1  - Berndsen, L.
A1  - Lüth, H.
A1  - Schultze, J. W.
A1  - Schöning, Michael Josef
T1  - Multi-Parameter-Detektions-System unter dem Einsatz eines einzigen Transducerprinzips sowohl für (bio-)chemische als auch physikalische Sensoren
JF  - Sensoren und Mess-Systeme : Vorträge der 11. ITG/GMA-Fachtagung vom 11. bis 12. März 2002 in Ludwigsburg / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ... Wiss. Tagungsleitung: C. D. Kohl ....
Y1  - 2002
SN  - 3-8007-2675-0
N1  - Sensoren und Mess-Systeme 2002
SP  - 137
EP  - 140
PB  - VDE-Verl.
CY  - Berlin [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Buß, G.
A1  - Lüth, H.
A1  - Schultze, J.W.
T1  - Modifications and characterization of a silicon-based microelectrode array
JF  - Electrochimica Acta. 44 (1999), H. 21-22
Y1  - 1999
SN  - 0013-4686
SP  - 3899
EP  - 3910
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Lüth, H.
A1  - Wang, J.
A1  - Schöning, Michael Josef
T1  - Miniaturisierte Referenzelektroden in Siliziumtechnologie für elektrochemische Sensoranwendungen
JF  - Sensoren und Messsysteme 2004 : Tagung Ludwigsburg, 15. und 16. März 2004 / VDI-VDE-Gesellschaft Mess- und Automatisierungstechnik
Y1  - 2004
SN  - 3-18-091829-2
N1  - Auch erschienen als: VDI-Berichte ; 1829
SP  - 847
EP  - 850
PB  - VDI
CY  - Düsseldorf
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Dawgul, M.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Miniaturised reference electrodes for field-effect sensors compatible to silicon chip technology
JF  - Electrochimica Acta. 51 (2005), H. 5
Y1  - 2005
SN  - 0013-4686
U6  - http://dx.doi.org/10.1016/j.electacta.2005.04.063
SP  - 930
EP  - 937
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Lüth, H.
T1  - Microfabricated semiconductor structures – Advances in (bio-)chemical sensing
JF  - Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed.
Y1  - 2002
SN  - 3-540-43699-5
SP  - 79
EP  - 92
PB  - Springer
CY  - Berlin [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schroth, P.
A1  - Hummel, Hans E.
A1  - Weißbecker, B.
A1  - Lüth, H.
A1  - Schütz, S.
T1  - Microcsaled living bioelectronic systems – Coupling beetles to silicon transducers
JF  - Chemical and biological sensors and analytical methods : proceedings of the international symposium / Sensor, Physical Electrochemistry, and Organic and Biological Electrochemistry Divisions. Ed.: M. Butler
Y1  - 2001
SN  - 1-56677-351-2
N1  - International Symposium: Chemical and Biological Sensors and Analytical Methods ; (2 : 2001.)
SP  - 165
EP  - 173
PB  - Electrochemical Society
CY  - Pennington, NJ
ER  - 
TY  - JOUR
A1  - Kurowski, A.
A1  - Schultze, J.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Micro- and nanopatterning of sensor chips by means of macroporous silicon.
JF  - Sensors and Actuators B. 83 (2002), H. 1-3
Y1  - 2002
SN  - 0925-4005
N1  - Selected Papers from TRANSDUCERS '01 EUROSENSORS XV
SP  - 123
EP  - 128
ER  -