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Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors

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Metadaten
Author:Michael Josef SchöningORCiD, A. Schaub, A. Zundel, L. Beckers, J. Schubert, W. Zander, P. Kordos, H. Lüth
ISBN:2-86332-182-X
Parent Title (English):Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff
Publisher:Ed. Frontières
Place of publication:Gif-sur-Yvette
Document Type:Article
Language:English
Year of Completion:1995
Date of the Publication (Server):2012/12/18
Length:XLV, 847 S : Ill., graph. Darst.
First Page:601
Last Page:604
Note:
ESSDERC ; (25, 1995, 's-Gravenhage) ; European Solid State Device Research Conference (ESSDERC) ; (25 : ; 1995.09.25-27 : ; Den Haag)
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik