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Fertigung von Mikroaktoren mittels LIGA-Technik. Lehr, H.; Abel, S.; Chritz, G.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.

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Metadaten
Author:Klaus-Peter Kämper
Parent Title (German):Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International
Place of publication:Stuttgart
Document Type:Article
Language:German
Year of Completion:1994
Date of the Publication (Server):2012/12/18
Length:getr. Zählung
Note:
MicroEngineering ; (1, 1994, Stuttgart)
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik

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