Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.
| Author: | Klaus Prume, H. Raeder, F. Tyholdt, W. E. Booij |
|---|---|
| ISBN: | 1385-3449 |
| Parent Title (English): | Journal of Electroceramics. 19 (2007), H. 4 |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2007 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 357 |
| Last Page: | 362 |
| Link: | http://dx.doi.org/10.1007/s10832-007-9036-3 |
| Zugriffsart: | campus |
| Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |
