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Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application / Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.;

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Metadaten
Author:Klaus Prume
Document Type:Article
Language:English
Year of Completion:2007
Date of the Publication (Server):2012/12/18
First Page:702
Note:
ISAF 2007. Sixteenth IEEE International Symposium on  Applications of Ferroelectrics, 2007
Link:http://dx.doi.org/10.1109/ISAF.2007.4393376
Zugriffsart:campus
Institutes:FH Aachen / Fachbereich Elektrotechnik und Informationstechnik