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Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan

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Metadaten
Author:Klaus Prume, Paul Muralt, Florian Calame, Thorsten Schmitz-Kempen
ISBN:1385-3449
Parent Title (English):Journal of Electroceramics. 19 (2007), H. 4
Document Type:Article
Language:English
Year of Completion:2007
Date of the Publication (Server):2012/12/18
First Page:407
Last Page:411
Link:http://dx.doi.org/10.1007/s10832-007-9065-y
Zugriffsart:campus
Institutes:FH Aachen / Fachbereich Elektrotechnik und Informationstechnik