Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;
| Author: | Klaus Prume, P. Muralt, F. Calame, T. Schmitz-Kempen |
|---|---|
| ISBN: | 0885-3010 |
| Parent Title (English): | IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1 |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2007 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 81 |
| Last Page: | 14 |
| Link: | http://dx.doi.org/10.1109/TUFFC.2007.206 |
| Zugriffsart: | campus |
| Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |
