Metadaten| Author: | Holger HeuermannORCiD, A. Rumiantsev, S. Schott |
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| ISBN: | 0-7803-8371-0 |
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| Parent Title (English): | On wafer characterization : 63rd ARFTG conference digest, spring 2004, 11 June 2004, Fort Worth, TX / Automatic RF Techniques Group. [Conference chair: John Cable. Publication chair: J. G. Burns] |
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| Publisher: | IEEE Operations Center |
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| Place of publication: | Piscataway, NJ |
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| Document Type: | Article |
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| Language: | English |
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| Year of Completion: | 2004 |
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| Date of the Publication (Server): | 2012/12/18 |
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| Length: | X, 227 S : Ill., graph. Darst. |
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| First Page: | 91 |
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| Last Page: | 96 |
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| Note: | Microwave Theory and Techniques Society. ; Automatic RF Techniques Group ; ARFTG conference ; (63 : ; 2004.06.11 : ; Fort Worth, Tex.) |
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| Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |
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