High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater materials
- Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing nondispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated by employing different kinds of metallic and semiconductor heater materials. Our results clearly reveal the superior high-temperature performance of semiconductor over metallic heater materials. Long-term stable emitter operation in the vicinity of 1300 K could be attained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements.
Verfasserangaben: | Jan Spannhake, Olaf Schulz, Andreas Helwig, Angelika Krenkow, Gerhard Müller, Theodor Doll |
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URN: | urn:nbn:de:hbz:a96-opus-1513 |
DOI: | https://doi.org/10.21269/121 |
Dokumentart: | Konferenzveröffentlichung |
Sprache: | Englisch |
Erscheinungsjahr: | 2006 |
Veröffentlichende Institution: | Fachhochschule Aachen |
Beteiligte Körperschaft: | International Symposium on Sensor Science, I3S 2005 <3; 2005; Juelich, Germany> |
Datum der Publikation (Server): | 22.05.2006 |
Freies Schlagwort / Tag: | Hotplate; antimony doped tin oxide; doped metal oxide; doped silicon; electro-migration; heater metallisation; high-temperature stability |
GND-Schlagwort: | Biosensor |
Quelle: | http://www.mdpi.org/sensors/papers/s6040405.pdf |
Fachbereiche und Einrichtungen: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
DDC-Klassifikation: | 5 Naturwissenschaften und Mathematik / 57 Biowissenschaften; Biologie / 570 Biowissenschaften; Biologie |
collections: | FH Aachen / International Symposium on Sensor Science, I3S 2005 <3; 2005; Ju |