High resolution LAPS using amorphous silicon as the semiconductor material
| Author: | W. Moritz, T. Yoshinobu, F. Finger, S. Krause, M. Martin-Fernandez, Michael Josef SchöningORCiD |
|---|---|
| ISBN: | 0925-4005 |
| Parent Title (English): | Sensors and Actuators B. 103 (2004), H. 1-2 |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2004 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 436 |
| Last Page: | 444 |
| Link: | http://dx.doi.org/10.1016/j.snb.2004.04.073 |
| Zugriffsart: | campus |
| Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
| FH Aachen / INB - Institut für Nano- und Biotechnologien |
