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Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies

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Author:Michael Josef SchöningORCiD, Niko Näther, V. Auger, Arshak PoghossianORCiD, M. Koudelka-Hep
Parent Title (English):Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors
Publisher:Japan Association of Chemical Sensors
Place of publication:Fukuoka
Document Type:Article
Language:English
Year of Completion:2004
Date of the Publication (Server):2012/12/18
Length:887, 12 S : Ill., graph. Darst.
First Page:554
Last Page:555
Note:
Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba)
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik
FH Aachen / INB - Institut für Nano- und Biotechnologien