Self-aligned nanogaps and nanochannels via conventional photolithography and pattern-size reduction technique
| Author: | Heiko Spelthahn, Arshak PoghossianORCiD, Michael Josef SchöningORCiD |
|---|---|
| ISBN: | 0013-4686 |
| Parent Title (English): | Electrochimica Acta. 54 (2009), H. 25 Sp. Iss. SI |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2009 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 6010 |
| Last Page: | 6014 |
| Link: | http://dx.doi.org/10.1016/j.electacta.2009.03.029 |
| Zugriffsart: | campus |
| Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
| FH Aachen / INB - Institut für Nano- und Biotechnologien |
