Surface reactions of trimethylgallium and trimethylarsenic on silicon surfaces
| Author: | Arnold Förster, H. Lüth |
|---|---|
| ISBN: | 1071-1023 |
| Parent Title (English): | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 7 (1989), H. 4 |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 1989 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 720 |
| Last Page: | 724 |
| Note: | ISSN der E-Ausg.: 0734-211X |
| Link: | http://dx.doi.org/10.1116/1.584632 |
| Zugriffsart: | bezahl |
| Institutes: | FH Aachen / Fachbereich Energietechnik |
