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A semiconductor-based field-effect platform for (bio-)chemical and physical sensors: From capacitive EIS sensors and LAPS over ISFETs to nano-scale devices

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Author:Michael J. Schöning, Maryam H. Abouzar, Torsten Wagner, Niko Näther, David Rolka, Tatsuo Yoshinobu, Joachim P. Kloock, Monika Turek, Sven Ingebrandt, Arshak Poghossian
DOI:https://doi.org/10.1557/PROC-0952-F08-02
Parent Title (English):MRS Proceedings
Document Type:Conference Proceeding
Language:English
Year of Completion:2006
Date of the Publication (Server):2015/01/14
First Page:1
Last Page:9
Note:
Vol. 952 - Symposium F - Integrated Nanosensors
Zugriffsart:bezahl
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik
FH Aachen / INB - Institut für Nano- und Biotechnologien