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15-term self-calibration methods for the error-correction of on-wafer measurements

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Metadaten
Author:Holger HeuermannORCiD, B. Schiek
ISBN:0018-9456
Parent Title (English):IEEE transactions on instrumentation and measurement : IM / Institute of Electrical and Electronics Engineers, Instrumentation and Measurement Group. 46 (1997), H. 5
Document Type:Article
Language:English
Year of Completion:1997
Date of the Publication (Server):2012/12/18
First Page:1105
Last Page:1110
Link:http://dx.doi.org/10.1109/19.676721
Zugriffsart:campus
Institutes:FH Aachen / Fachbereich Elektrotechnik und Informationstechnik