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Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies

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Metadaten
Author:Michael Josef SchöningORCiD, Niko Näther, V. Auger, Arshak PoghossianORCiD, M. Koudelka-Hep
ISBN:0925-4005
Parent Title (English):Sensors and Actuators B. 108 (2005), H. 1-2
Document Type:Article
Language:English
Year of Completion:2005
Date of the Publication (Server):2012/12/18
First Page:986
Last Page:992
Note:
Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004
Link:http://dx.doi.org/10.1016/j.snb.2004.12.029
Zugriffsart:campus
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik
FH Aachen / INB - Institut für Nano- und Biotechnologien