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Pulsed laser deposition: A tool for fabricating thin-film microsensors

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Metadaten
Author:Joachim P. Kloock, Y. Mourzina, J. Schubert, Y. Ermelenko, Michael Josef SchöningORCiD
ISBN:0932-4666
Parent Title (English):Biomedizinische Technik. 49 (2004), H. 2
Document Type:Article
Language:English
Year of Completion:2004
Date of the Publication (Server):2012/12/18
First Page:1032
Last Page:1033
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik
FH Aachen / INB - Institut für Nano- und Biotechnologien

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