The Virtual Cleanroom – a new tool in teaching MST process technologies
| Author: | Klaus-Peter Kämper, Antoni Picard, Manfred Brill, Detlef (u.a.) Cassel |
|---|---|
| ISBN: | 0948-3128 |
| Parent Title (English): | mst news International newsletter on micro - nano Integration (2003) |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2003 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 35 |
| Last Page: | 36 |
| Institutes: | FH Aachen / Fachbereich Maschinenbau und Mechatronik |
