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A self-filling low-cost membrane micropump

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Metadaten
Author:Klaus-Peter Kämper, J. Döpper, W. Ehrfeld, S. Oberbeck
ISBN:078034412X
Parent Title (English):Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division
Publisher:IEEE Service Center
Place of publication:Piscataway, NJ
Document Type:Article
Language:English
Year of Completion:1998
Date of the Publication (Server):2012/12/18
Length:XXX, 660 S.
First Page:432
Last Page:437
Note:
International Workshop on Micro-Electro-Mechanical Systems <11, 1998, Heidelberg>
Link:http://dx.doi.org/10.1109/MEMSYS.1998.659796
Zugriffsart:bezahl
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik