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Simulation supported design of LIGA Microsystems. Kämper, K.-P.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.

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Author:Klaus-Peter Kämper, J. Döpper, W. Ehrfeld, B. Hagemann
Parent Title (English):Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey
Publisher:Computational Mechanics Publ.
Place of publication:Southampton [u.a.]
Document Type:Article
Year of Completion:1995
Date of the Publication (Server):2012/12/18
Length:337 S : Ill., graph. Darst.
First Page:3
Last Page:10
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik