Metadaten| Author: | Torsten WagnerORCiD, T. Yoshinobu, C. Rao, R. Otto, Michael Josef SchöningORCiD |
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| ISBN: | 0-7803-83995-6 |
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| Parent Title (English): | Transducers '05 : the 13th International Conference on Solid-State Sensors, Actuators and Microsystems ; Seoul, Korea, [June 5 - 9, 2005] ; digest of technical papers / sponsored by Korean Sensors Society. Technical co-sponsors: IEEE Electron Devices Society |
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| Publisher: | IEEE Operations Center |
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| Place of publication: | Piscataway, NJ |
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| Document Type: | Article |
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| Language: | English |
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| Year of Completion: | 2005 |
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| Date of the Publication (Server): | 2012/12/18 |
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| First Page: | 1872 |
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| Last Page: | 1875 |
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| Note: | International Conference on Solid State Sensors, Actuators and Microsystems ; (13, 2005, Seoul) |
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| Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
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| FH Aachen / INB - Institut für Nano- und Biotechnologien |
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