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Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C.

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Metadaten
Author:Klaus-Peter Kämper, W. Ehrfeld, V. Hessel, M. Lacher
ISBN:0-7803-3664-X
Parent Title (English):Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1
Publisher:IEEE Service Center
Place of publication:Piscataway, NJ
Document Type:Article
Language:English
Year of Completion:1997
Date of the Publication (Server):2012/12/18
Length:XVI, 438 S.
First Page:71
Last Page:79
Link:http://dx.doi.org/10.1109/ICMEL.1997.625185
Zugriffsart:bezahl
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik