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LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F.; Thürigen, C.

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Metadaten
Author:Klaus-Peter Kämper, B. Hagemann, H. Lehr, F. Michel
Parent Title (English):LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.
Publisher:FSRM
Place of publication:Neuchatel
Document Type:Article
Language:English
Year of Completion:1995
Date of the Publication (Server):2012/12/18
Length:S. a - c, 139 S.; Ill., graph. Darst.
First Page:100
Last Page:110
Note:
University Enterprise Training Partnership for Micro-Electro-Mechanical Systems
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik