Assembly of Electromagnetic Milliactuators with LIGA Components. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Thürigen, C.
Metadaten| Author: | Klaus-Peter Kämper, H. Lehr, S. Abel, W. Ehrfeld |
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| Parent Title (English): | Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994) |
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| Publisher: | Fuji Technology Press |
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| Document Type: | Article |
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| Language: | English |
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| Year of Completion: | 1995 |
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| Date of the Publication (Server): | 2012/12/18 |
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| First Page: | 31 |
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| Last Page: | 31 |
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| Note: | 2nd Japan-France Congress on mechatronics (1994 Nov : Takamatsu, Japan) |
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| Institutes: | FH Aachen / Fachbereich Maschinenbau und Mechatronik |
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