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LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.; Schmidt, M.

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Author:Klaus-Peter Kämper, H. Lehr, W. Ehrfeld, F. Michel
Parent Title (English):1994 IEEE Symposium on Emerging Technologies & Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN
Place of publication:Piscataway, N.J.
Document Type:Article
Year of Completion:1994
Date of the Publication (Server):2012/12/18
Length:477 S : Ill.
First Page:43
Last Page:47
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik