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Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.

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Metadaten
Author:Klaus-Peter Kämper, M. Abraham, W. Ehrfeld, V. Hessel
ISBN:0167-9317
Parent Title (English):Microelectronic Engineering. 41-42 (1998)
Document Type:Article
Language:English
Year of Completion:1998
Date of the Publication (Server):2012/12/18
First Page:47
Last Page:52
Note:
International Conference on Micro- and Nanofarbication <Athens, Greece, 15 September - 18 September 1998>
Link:http://dx.doi.org/10.1016/S0167-9317(98)00011-2
Zugriffsart:campus
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik