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PCVD at high deposition rates. Geittner, P.; Hagemann, H. J.; Warnier, J.; Wilson, H.

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Metadaten
Author:Hans-Jürgen Hagemann, P. Geittner, J. Warnier, H. Wilson
ISBN:0733-8724
Parent Title (English):Journal of Lightwave Technology (J-LT) / Institute of Electrical and Electronics Engineers (IEEE). 4 (1986), H. 7
Document Type:Article
Language:English
Year of Completion:1986
Date of the Publication (Server):2012/12/18
First Page:818
Last Page:822
Institutes:FH Aachen / Fachbereich Elektrotechnik und Informationstechnik