Effect of O2 plasma on properties of electrolyte-insulator-semiconductor structures
Author: | Julio Arreola, Michael Keusgen, Michael Josef SchöningORCiD |
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DOI: | https://doi.org/10.1002/pssa.201700025 |
ISSN: | 1862-6319 |
Parent Title (English): | physica status solidi a : applications and materials sciences |
Publisher: | Wiley-VCH |
Place of publication: | Weinheim |
Document Type: | Article |
Language: | English |
Year of Completion: | 2017 |
Date of the Publication (Server): | 2017/08/21 |
Issue: | Early view |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien | |
collections: | Verlag / Wiley-VCH |