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Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays

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Metadaten
Author:F. Faßbender, G. Schmitt, Michael Josef SchöningORCiD, H. Lüth, G. Buß, J. W. Schultze
ISBN:0925-4005
Parent Title (English):Sensors and Actuators B. 68 (2000), H. 1-3
Document Type:Article
Language:English
Year of Completion:2000
Date of the Publication (Server):2012/12/18
First Page:128
Last Page:133
Link:http://dx.doi.org/10.1016/S0925-4005(00)00472-X
Zugriffsart:campus
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik
FH Aachen / INB - Institut für Nano- und Biotechnologien