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Diamond chemical vapor deposition: gas compositions and film properties / Bachmann, P.K.; Hagemann, H.-J.; Lade, H; Leers, D.; Picht, F.; Wiechert, D.U.; Wilson, H.

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Metadaten
Author:Hans-Jürgen Hagemann, P.K. Bachmann, H. Lade, D. Leers
ISBN:1-55899-239-1
Parent Title (English):Diamond, SiC and nitride wide bandgap semiconductors : symposium held April 4 - 8, 1994, San Francisco, California, U.S.A. / ed.: Calvin H. Carter, Jr. ...
Place of publication:Pittsburgh, Penn.
Document Type:Article
Language:English
Year of Completion:1994
Date of the Publication (Server):2012/12/18
Length:XV, 760 S. : Ill., graph. Darst.
First Page:267
Last Page:277
Note:
Materials Research Society symposium proceedings ; 339
Institutes:FH Aachen / Fachbereich Elektrotechnik und Informationstechnik