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Amorphous silicon as semiconductor material for high resolution LAPS

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Author:Werner Moritz, Tatsuo Yoshinobu, Friedhelm Finger, Steffi Krause, Michael Josef SchöningORCiD
Parent Title (English):Eurosensors XVII : the 17th European Conference on Solid-State Transducers ; University of Minho, Guimarães, Portugal, September 21 - 24, 2003
Document Type:Conference Proceeding
Language:English
Year of Completion:2003
Date of the Publication (Server):2015/01/15
First Page:48
Last Page:49
Link:http://repositorium.sdum.uminho.pt/bitstream/1822/4837/1/BookOfAbstractsFinal.pdf
Zugriffsart:weltweit
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik
FH Aachen / INB - Institut für Nano- und Biotechnologien