Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy
| Author: | Arnold Förster, J. M. Layet, H. Lüth |
|---|---|
| ISBN: | 0169-4332 |
| Parent Title (English): | Applied Surface Science. 41 - 42 (1989) |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 1989 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 306 |
| Last Page: | 311 |
| Note: | ISSN der E-Ausg.: 0169-4332 |
| Link: | http://dx.doi.org/10.1016/0169-4332(89)90076-7 |
| Zugriffsart: | campus |
| Institutes: | FH Aachen / Fachbereich Energietechnik |
