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The effect of inhomogeneous dopant profiles on the electron energy loss spectra of Si(100) /

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Metadaten
Author:Arnold Förster, J. M. Layet, H. Lüth
ISBN:0947-8396
Parent Title (English):Applied Physics A: Materials Science & Processing. 47 (1988), H. 1
Document Type:Article
Language:English
Year of Completion:1988
Date of the Publication (Server):2012/12/18
First Page:95
Last Page:97
Note:
ISSN der E-Ausg.: 1432-0630
Link:http://dx.doi.org/10.1007/BF00619705
Zugriffsart:campus
Institutes:FH Aachen / Fachbereich Energietechnik