Capacitive microsensors for biochemical sensing based on porous silicon technology
| Author: | Michael Josef SchöningORCiD, M. Thust, P. Kordos, J.W. Schultze, H. Lüth |
|---|---|
| Parent Title (English): | Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek |
| Publisher: | Elsevier |
| Place of publication: | Amsterdam [u.a.] |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2000 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 1184 |
| Last Page: | 1187 |
| Note: | International Conference on Solid State Sensors and Actuators <10, 1999, Sendai, Miyagi-ken> ; Transducers '99 ; (10 : ; 1999.06.07-10 : ; Sendai) |
| Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
